Crystallinity and mechanical effects from annealing Parylene thin films

Jackson, Nathan; Stam, Frank; O'Brien, J.; Kailas, Lekshmi; Mathewson, A.; O'Murchu, Cian

doi:10.1016/j.tsf.2016.02.047

Cited by 37 publications

(31 citation statements)

References 19 publications

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“…A thick Parylene N layer was not easily achieved due to the low deposition rate, so a hybrid material was deposited. A detailed description of the Parylene deposition process was previously described [32]. A thin layer of Silane (A-174, Sigma Aldrich) was applied to all samples prior to depositing the Parylene, which acted as an adhesion promoter.…”

Section: A Integration Processmentioning

confidence: 99%

“…This technique allows for thin or thick layers to be created. Thermal properties of the films were not analyzed but previous reports using NdFeB powders with Parylene C binder [20] demonstrated a loss of remanence at 120°C due to the glass transition temperature of Parylene C. However, enhancement of the thermal properties could be obtained by: a) using high temperature Parylene (AF4), or b) annealing the Parylene to increase the crystallinity prior to magnetization, as this will prevent the Parylene film from softening during elevated temperatures [32].…”

Section: A Magnetic Film Characterizationmentioning

confidence: 99%

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Integration of Thick-Film Permanent Magnets for MEMS Applications

Jackson

Pedrosa

Bollero

et al. 2016

J. Microelectromech. Syst.

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This paper presents a method of integrating thick permanent magnetic films into a microfabrication process. An enhanced binding method consisting of a hybrid of Parylene N and Parylene C thin films was used in conjunction with various types of NdFeB powders to create embedded permanent magnet films. A systematic study of composite magnetic powders was developed using three different powders in order to control intrinsic coercivities (H ci ) and remanence (B r ) properties. In addition, four types of dispensing methods were investigated. A liquid dispensing method demonstrated the highest fill factor (79%) for a 400-µm-thick film with an enhanced remanence value of 0.59 T. A range of remanence values from 0.2 to 0.59 T were developed by varying the concentration of multiple magnetic powders within the composite material. Validation of the integrated magnetic material into a microelectromechanical system device was demonstrated through a polymer on a silicon cantilever structure.[ 2016-0073]Index Terms-Microelectromechanical systems (MEMS), integration, magnetic powders, bonded permanent magnets, Parylene.

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Section: A Integration Processmentioning

confidence: 99%

Section: A Magnetic Film Characterizationmentioning

confidence: 99%

Integration of Thick-Film Permanent Magnets for MEMS Applications

Jackson

Pedrosa

Bollero

et al. 2016

J. Microelectromech. Syst.

Self Cite

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“…An increase in crystallinity and mechanical stability has been reported for PPX and its derivatives. [ 16,25 ] Elkasabi et al. also investigated PPX‐AM thin films using X‐ray diffraction measurements, but no crystallinity was found both before and after a post‐deposition heat‐treatment step at 120 °C.…”

Section: Resultsmentioning

confidence: 99%

“…So far, mainly changes in the crystalline structure upon varying process conditions have been characterized. [ 14–16 ] Bier et al. investigated the molecular structure of soluble PPX‐derivatives with varying length of alkyl chain side groups.…”

Section: Introductionmentioning

confidence: 99%

Molecular Changes in Vapor‐Based Polymer Thin Films Assessed by Characterization of Swelling Properties of Amine‐Functionalized Poly‐p‐xylylene

Koenig

Trouillet

Welle

et al. 2020

Macro Chemistry & Physics

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“…S4 ). These two peaks at 2 θ = 17.0 and 19.5° can be assigned to a monoclinic crystal structure (α phase) in the (020) plane and a hexagonal crystal structure (β phase) in the (400) plane, respectively 24 . The other film 4 displayed a single reflection peak at 2 θ = 22.4°.…”

Section: Deposition Of Poly- P -Xylylene Nanofilmsmentioning

confidence: 99%

Selective Blocking Property of Microporous Polymer Membranes Fabricated by Chemical Vapor Deposition

Shii

Hatori

Yokota

et al. 2017

Sci Rep

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Poly-p-xylylene films have been utilized as protective and barrier layers for gases and solvents on electronic and implantable devices. Here we report a new approach to create highly permeable and selective nanofiltration membranes coated with microporous poly-p-xylylene nanofilms fabricated through a dry chemical vapor deposition process by using [2.2]paracyclophanes derivatives on ultrafiltration membranes. The introduction of crosslinking points into rigid poly-p-xylylenes enhanced microporosity and mechanical strength due to insufficient packing and depression of structural relaxation among polymer chains in three-dimensional networks. Crosslinked nanofilms with thicknesses down to 50 nm showed outstanding permeability for water and alcohols at a pressure difference of 0.5 MPa and exhibited higher rejection ratios for water-soluble organic dyes than non-crosslinked nanofilms. Poly-p-xylylene nanofilms also showed an excellent blocking property for non-polar organic solvent permeation through specific interaction of hydrophilic pores with organic solvents.

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Crystallinity and mechanical effects from annealing Parylene thin films

Cited by 37 publications

References 19 publications

Integration of Thick-Film Permanent Magnets for MEMS Applications

Integration of Thick-Film Permanent Magnets for MEMS Applications

Molecular Changes in Vapor‐Based Polymer Thin Films Assessed by Characterization of Swelling Properties of Amine‐Functionalized Poly‐p‐xylylene

Selective Blocking Property of Microporous Polymer Membranes Fabricated by Chemical Vapor Deposition

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