2022
DOI: 10.21883/tp.2022.11.55178.180-22
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Crystallization and silicon carbide formation in two-layer amorphous silicon-carbon films during electron irradiation

Abstract: It is shown that the irradiation by focused electron beam with electron energy of 10 keV of two-layer amorphous silicon-carbon films 60 nm thick results in films partial crystallization. Moreover, in the irradiated zone the layer of crystalline silicon carbide with luminescent properties is formed. The observed effects are confirmed by methods of Raman spectroscopy and by luminescence spectra Keywords: silicon, carbon, silicon carbide, film, structure, electron beam, Raman spectroscopy.

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Cited by 4 publications
(2 citation statements)
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“…[15,16]. The broadening of the peaks at these frequencies is typical for the breathing modes C=C that are usually present in the amorphous carbon in the frequency range of 1330-1350 cm −1 [21,22] and are also characteristic of the effect of stretching C=C modes in a disordered graphite [23]. It is well known that amorphous sp 2 carbon exhibits vibrational features resulting in the overlap of the two main bands, G and D [24,25], and the formation of C=O bonds [8], which is typical of colloidal solutions of ShC.…”
Section: Characterization Of Raman Spectramentioning
confidence: 84%
“…[15,16]. The broadening of the peaks at these frequencies is typical for the breathing modes C=C that are usually present in the amorphous carbon in the frequency range of 1330-1350 cm −1 [21,22] and are also characteristic of the effect of stretching C=C modes in a disordered graphite [23]. It is well known that amorphous sp 2 carbon exhibits vibrational features resulting in the overlap of the two main bands, G and D [24,25], and the formation of C=O bonds [8], which is typical of colloidal solutions of ShC.…”
Section: Characterization Of Raman Spectramentioning
confidence: 84%
“…An amorphous halo in the area 2θ = 7-11 • is not characteristic of silica and may correspond to the formation of a carbon structure in the material, which is close to the graphitopod phase or graphite oxide. The crystalline phase in area 7-11 • (d = 10.901; 10.463; 9.425; 8.400 Å) is typical for graphite oxide (GO) with crystallographic index 002 [28]. Graphite oxide is a product of variable composition consisting of hydrophilic layers (d = 6-12 Å) and intercalated water molecules [24].…”
Section: X-ray Diffraction Studiesmentioning
confidence: 99%