2009
DOI: 10.1063/1.3212732
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Crystallization times of Ge–Te phase change materials as a function of composition

Abstract: The crystallization times of Ge–Te phase change materials with variable Ge concentrations (29.5–72.4 at. %) were studied. A very strong dependence of the crystallization time on the composition for as-deposited, amorphous films was confirmed, with a minimum for the stoichiometric composition GeTe. The dependence is weaker for melt-quenched, amorphous material and crystallization times are between one to almost four orders of magnitude shorter than for as-deposited materials. This is promising for applications … Show more

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Cited by 123 publications
(65 citation statements)
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“…According to the recent study in Ref. 20, it can be expected that crystallization upon single laser pulse irradiation can be achieved only with pulses >30 ns. In order to achieve crystallization with shorter pulses, additional optimization of the heat-flow conditions is required.…”
Section: Quantification Of the Optical Contrastmentioning
confidence: 99%
See 1 more Smart Citation
“…According to the recent study in Ref. 20, it can be expected that crystallization upon single laser pulse irradiation can be achieved only with pulses >30 ns. In order to achieve crystallization with shorter pulses, additional optimization of the heat-flow conditions is required.…”
Section: Quantification Of the Optical Contrastmentioning
confidence: 99%
“…17,18 GeTe in particular has received increasing industrial interest as an active material in electrical PCMs, especially in nonvolatile memory devices. 19 Recently, Raoux et al 20 reported an extensive study on crystallization times in GeTe films produced via rf sputtering as a function of alloy composition. They confirmed earlier reports, by Chen et al, 5 that crystallization times for compositions other than the stoichiometric one increase by orders of magnitude, and they underlined the role played by the melt-quenched amorphous phase in the fast re-crystallization process.…”
Section: Introductionmentioning
confidence: 99%
“…Earlier studies in the low-temperature regime have determined crystal growth velocities of as-deposited (AD) PCMs 10 and a comparison with growth velocities of melt-quenched (MQ) material 11 revealed a few hundred times higher rates in the MQ glassy state. Laser-driven experiments revealed that shorter pulses can induce crystallization in the MQ but not in the AD state 12,13 . However, approaches to study crystal growth velocities based on optical lasers or electrical excitation were limited to pulse lengths longer than a nanosecond and therefore could not determine growth velocities over the entire range of temperatures 11,[13][14][15][16] .…”
mentioning
confidence: 99%
“…The initial on-state resistance as-received from the integrated circuit foundry was 1.22 X, which, after about 20 pulses, settles in to a value of under 0.9 X. While GeTe has been shown to crystallize with a heat pulse as short as 30ns, 18 we find that a longer $1ls pulse produces the lowest resistance on-state. For the experiments reported here, we did neither monitor the NiCrSi's resistance nor the GeTe's resistance with time, and thus, the exact time required to switch off-to-on or on-to-off is not known.…”
mentioning
confidence: 79%