“…5b-b', the CSi surface also shows strong IR features below 900 cm . 16,17,[22][23][24]31,32 Newly appeared tiny peaks at 1307, 1153, 1016, 833 cm -1 are ascribed to stretching modes of P=O, P-O-C and P-F group from -O=PF-OR organic phosphorus-fluorine compounds. 31,32,43 They are partly overlapped with the peaks at 1108 and ~1045 cm -1 characteristic of siloxane chain, 16,31,32 in Fig.…”