Cutaneous exposure scenarios for engineered nanoparticles used in semiconductor fabrication: a preliminary investigation of workplace surface contamination

Shepard, Michele; Brenner, Sara

doi:10.1179/2049396714y.0000000074

Cited by 18 publications

(16 citation statements)

References 37 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The data presented here are part of a larger, comprehensive exposure assessment scheme, assessing potential exposure to ENMs in several CMP-related spaces within the sampling facility. Based on previous findings, (10,31) the WWT area was identified as the highest-risk workspace in this assessment scheme, warranting a deeper investigation of potential inhalation exposures in this location. The results of that prioritized investigation are the focus of this study.…”

Section: Resultsmentioning

confidence: 99%

“…The investigators initiated exposure assessment research using this comprehensive sampling approach in 2011 in coordination with the NIOSH Nanotechnology Field Research Team, and have since continued gathering data and tailoring the approach for specific tasks and locations based on evolving best-known methods. Data collected prior to the sampling period reported in this article has either been reported (10,31) or is currently being prepared for publication. These reports include data and EM micrographs from air sampling events (58 TEM samples and 8 SEM samples) and from surface sampling events (17 TEM samples and 5 SEM samples) collected since 2011.…”

Section: Sampling Locationmentioning

confidence: 97%

See 1 more Smart Citation

Occupational Exposure to Airborne Nanomaterials: An Assessment of Worker Exposure to Aerosolized Metal Oxide Nanoparticles in Semiconductor Wastewater Treatment

Brenner

Neu‐Baker

Caglayan

et al. 2015

Journal of Occupational and Environmental Hygiene

View full text Add to dashboard Cite

This study characterized potential inhalation exposures of workers to nanometal oxides associated with industrial wastewater treatment processes in a semiconductor research and development facility. Exposure assessment methodology was designed to capture aerosolized engineered nanomaterials associated with the chemical mechanical planarization wafer polishing process that were accessible for worker contact via inhalation in the on-site wastewater treatment facility. The research team conducted air sampling using a combination of filter-based capture methods for particle identification and characterization and real-time direct-reading instruments for semi-quantitation of particle number concentration. Filter-based samples were analyzed using electron microscopy and energy-dispersive x-ray spectroscopy while real-time particle counting data underwent statistical analysis. Sampling conducted over 14 months included 5 discrete sampling series events for 7 job tasks in coordination with on-site employees. The number of filter-based samples captured for analysis by electron microscopy was: 5 from personal breathing zone, 4 from task areas, and 3 from the background. Direct-reading instruments collected data for 5 sample collection periods in the task area and the background, and 2 extended background collection periods. Engineered nanomaterials of interest (Si, Al, Ce) were identified by electron microscopy in filter-based samples from all areas of collection, existing as agglomerates (>500 nm) and nanoparticles (100 nm-500 nm). Particle counts showed an increase in number concentration during and after selected tasks above background. While additional data is needed to support further statistical analysis and determine trends, this initial investigation suggests that nanoparticles used or generated by chemical mechanical planarization become aerosolized and may be accessible for inhalation exposures by workers in wastewater treatment facilities. Additional research is needed to further quantify the level of exposure and determine the potential human health impacts.

show abstract

Section: Resultsmentioning

confidence: 99%

Section: Sampling Locationmentioning

confidence: 97%

Occupational Exposure to Airborne Nanomaterials: An Assessment of Worker Exposure to Aerosolized Metal Oxide Nanoparticles in Semiconductor Wastewater Treatment

Brenner

Neu‐Baker

Caglayan

et al. 2015

Journal of Occupational and Environmental Hygiene

View full text Add to dashboard Cite

show abstract

“…These methods, along with wipe sampling methods, are being used in a growing number of workplaces, despite the uncertainty in the findings at the current state of knowledge [18].…”

Section: Microvacuummentioning

confidence: 99%

“…It is also possible to consider the use of special wipes (such as Ghost Wipes), which are easier to dissolve prior to a chemical analysis and have been already used in NPs assessment [18].…”

Section: Skin Wipingmentioning

confidence: 99%

See 1 more Smart Citation

Nano-Scaled Particles and Fibres Occupational Exposure Assessment: An Integrated Approach from Air Sampling to Skin and Surface Contamination

Prodi¹,

Filon²

2016

Nano BioMed ENG

View full text Add to dashboard Cite

Workers may be exposed to nanoparticles (NPs) by inhalation, cutaneous contact and gastroenteric pathways, but today there is no standardized method for either assessing or monitoring the occupational exposure. Moreover, there is no all-in-one assessment strategy, so it is preferable to consider different perspectives. Every assessment should be preceded by a preliminary analysis of the workplace in order to gather useful data on the potential exposure sources, which will help in outlining the assessment strategy. The purpose of air monitoring should be to characterize NP emissions and assess, as a minimum, the mass, particle number concentration, granulometric distribution, specific surface and chemical composition. There are several techniques which may assess these characteristics: the most used in real occupational contexts are mobility particle sizers, particle counters (optical, condensation, etc.), surface area monitors, while personal samplers are promising tools which still have been used almost only in research or controlled contexts. Skin and surfaces may be sampled according to the nature of substances and the circumstances of exposure. Sampling methods can be divided in three main categories: interception (e.g. carbon tabs), removal (e.g. adhesive tape stripping, wiping), in situ methods (e.g. UV fluorescence). Chemical analysis methods (e.g. spectroscopy) and electron microscopy techniques may enhance available data. Considering the available information, we suggest a stepwise approach for risk assessment composed of three steps, starting from a quick and relatively cheap screening method to assess exposure, followed by 2 gradually more accurate but costly approaches to perform whether a significant exposure is detected.

show abstract

Engineered Nanomaterials

Lin

2023

Patty's Toxicology

View full text Add to dashboard Cite

Engineered nanomaterials (ENMs) are intentionally designed materials of ≤100 nm such as titanium dioxide nanoparticles, cerium oxide nanoparticles, iron oxide nanoparticles, silver or gold nanoparticles, carbon family nanomaterials (graphene, quantum dots, nanohorns, nanotubes, fullerene/buckyballs), transitional metal dichalcogenide nanoparticles, or silica nanoparticles. These have entered our lives through industrial and consumer products, or workplace exposure. As learned industrial professionals, we can deal with this influx through a better understanding of ENMs themselves, and their underlying potential toxicity. In spite of ever‐changing rules due to an improved understanding of the toxicological and environmental impact of ENMs, it is also extremely important to understand current EU and U.S. regulations with regard to workplace exposure limits as well as how to better measure and manage the health risks. In this updated chapter, we cover the various types of ENMs, potential health effects such as cardiovascular, pulmonary, skin, gut, and immune toxicity, exposure assessment, and occupational risk management.

show abstract

Cutaneous exposure scenarios for engineered nanoparticles used in semiconductor fabrication: a preliminary investigation of workplace surface contamination

Abstract: Additional data are needed to evaluate occupational exposures from skin contact with engineered nanoparticles; precautionary measures should be used to minimize potential cutaneous exposures in the workplace.

Cited by 18 publications

References 37 publications

Occupational Exposure to Airborne Nanomaterials: An Assessment of Worker Exposure to Aerosolized Metal Oxide Nanoparticles in Semiconductor Wastewater Treatment

Occupational Exposure to Airborne Nanomaterials: An Assessment of Worker Exposure to Aerosolized Metal Oxide Nanoparticles in Semiconductor Wastewater Treatment

Nano-Scaled Particles and Fibres Occupational Exposure Assessment: An Integrated Approach from Air Sampling to Skin and Surface Contamination

Engineered Nanomaterials

Contact Info

Product

Resources

About