CVD diamond—Research, applications, and challenges

Abstract

7CVD diamond fi lms are currently prepared with high purity, and these materials resist electrical breakdown in high electric fi elds and exhibit electron and hole mobilities that are the highest among wide bandgap semiconductors. Dopants Diamond is a unique material that often exhibits extreme properties compared to other materials. Discovered about 30 years ago, the use of hydrogen in plasma-enhanced chemical vapor deposition (CVD) has enabled the growth and coating of diamond in fi lm form on various substrate materials. CVD diamond research has been actively continued subsequently to develop new understanding and approaches for the growth and processing of this fascinating material. Currently, the study and development of diamond fi lms has enabled a wide range of applications based on the combination of unique and extreme properties of diamond and the variety of fi lm properties obtainable through tuning the microstructure, morphology, impurities, and surfaces. This issue of MRS Bulletin introduces the latest research, recent applications, and the challenges ahead for CVD diamond fi lms.

Growth, structural and plasma illumination properties of nanocrystalline diamond-decorated graphene nanoflakes

“…Then the electrons are emitted to vacuum without any difficulty as the diamond H-terminated surface has a NEA in nature. 5,6 Additionally, the vertically aligned …”

Nanodiamonds: From Synthesis and Purification to Deposition Techniques, Hybrids Fabrication and Applications

“…This explains why diamond can be obtained under low pressure (20-100 Torr) and temperature (600-1000°C) conditions compared to HPHT. A recent MRS Bulletin was focused on CVD diamond and its applications [19].…”

“…Recent progresses of CVD synthesis allow an excellent control of incorporated impurities [19] and the possibility to get doped diamond with boron, phosphorous or nitrogen.…”

Nitrogen Incorporated Ultrananocrystalline Diamond Microstructures From Bias‐Enhanced Microwave N2/CH4‐Plasma Chemical Vapor Deposition

“…Appropriate control of the nanometer‐scale structures can lead to new science as well as new products, devices, and technologies. Extensive research has been carried out on the growth, properties, and applications of single crystalline and microcrystalline diamond (MCD) in the last few decades . Recently, main focus has been directed toward the synthesis of ultrananocrystalline diamond (UNCD) film in Ar/CH 4 plasma which possesses many excellent properties than MCD and potentially can be used in bio‐sensors, field emission devices, bio‐medical devices, and micro‐electro mechanical systems .…”