Defect Formation on the Surface of Silicon Substrates after Various Technological Operations

Kukurudziak, Mykola S.; Lipka, Volodymyr M.; Andreeva, Olha P.

doi:10.1109/elit61488.2023.10310993

2023 IEEE 13th International Conference on Electronics and Information Technologies (ELIT) 2023

DOI: 10.1109/elit61488.2023.10310993

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Defect Formation on the Surface of Silicon Substrates after Various Technological Operations

Mykola S. Kukurudziak,

Volodymyr M. Lipka,

Olha P. Andreeva

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Defect Formation on the Surface of Silicon Substrates after Various Technological Operations

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References 16 publications

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