Defect passivation and enhanced UV emission in β-Ga2O3 via remote fluorine plasma treatment

Salih, Amar K.; Fiedler, Saskia; Irvine, Curtis P.; Matar, Fatima; Phillips, Matthew R.; Ton-That, Cuong

doi:10.1016/j.apsusc.2024.162250

Applied Surface Science

2025

DOI: 10.1016/j.apsusc.2024.162250

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Defect passivation and enhanced UV emission in β-Ga2O3 via remote fluorine plasma treatment

Amar K. Salih,

Saskia Fiedler,

Curtis P. Irvine

et al.

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Defect passivation and enhanced UV emission in β-Ga2O3 via remote fluorine plasma treatment

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References 37 publications

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