Defects in silicon introduced by helium implantation and subsequent annealing

Capan, Ivana; Bąk‐Misiuk, J.; Pivac, Branko; Dubček, Pavo; Misiuk, A.; Bernstorff, Sigrid; Romanowski, P.

doi:10.1016/j.radphyschem.2011.02.006

Radiation Physics and Chemistry

2011

DOI: 10.1016/j.radphyschem.2011.02.006

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Defects in silicon introduced by helium implantation and subsequent annealing

Ivana Capan

J. Bąk‐Misiuk

Branko Pivac

et al.

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Cited by 3 publications

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Microstructural evolution and properties of He-charged a-Si coatings prepared by magnetron sputtering

Godinho,

Caballero-Hernández,

Lacroix

et al. 2024

Applied Surface Science

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Defects in silicon introduced by helium implantation and subsequent annealing

Cited by 3 publications

References 19 publications

Microstructural evolution and properties of He-charged a-Si coatings prepared by magnetron sputtering

Microstructural evolution and properties of He-charged a-Si coatings prepared by magnetron sputtering

Structural evolution of thermal annealed Si(0 0 1) surface layers fabricated by plasma immersion He+ implantation

Helium Bubbles Formed in Si(001) Layers after High-Dose Implantation and Thermal Annealing

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Defects in silicon introduced by helium implantation and subsequent annealing

Cited by 3 publications

References 19 publications

Microstructural evolution and properties of He-charged a-Si coatings prepared by magnetron sputtering

Microstructural evolution and properties of He-charged a-Si coatings prepared by magnetron sputtering

Structural evolution of thermal annealed Si(0 0 1) surface layers fabricated by plasma immersion He+ implantation

Helium Bubbles Formed in Si(001) Layers after High-Dose Implantation and Thermal Annealing

Contact Info

Product

Resources

About

Structural evolution of thermal annealed Si(0 0 1) surface layers fabricated by plasma immersion He+ implantation