Defining the role of SEM metrology for advanced process control

Abstract

The problem of enacting an effective Advanced Process Control (APC) system is herein discussed [1]. The schematic structure of the system is represented below: Lithography, Technology Photomask Design Process Engineering Technology SEM Metrology CD/LER/LWRThe creation of such a system with a communication link between the mask designer and lithography and process engineering of consequent operations can be broken down into two problems:1. Organization of the interaction of services performed by APC 2. Reliability of the measurement information obtained in SEM CD metrologyWe will focus on the second problem. The effectiveness of the operation of the APC system depends on the reliability (precision and accuracy) of the measurement outcomes.