Delta-doped electron-multiplied CCD with absolute quantum efficiency over 50% in the near to far ultraviolet range for single photon counting applications

Nikzad, Shouleh; Hoenk, Michael E.; Greer, Frank; Jacquot, Blake C.; Monacos, Steve; Jones, Todd J.; Blacksberg, Jordana; Hamden, Erika; Schiminovich, David; Martin, Chris; Morrissey, Patrick

doi:10.1364/ao.51.000365

Cited by 63 publications

(49 citation statements)

References 24 publications

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“…We explore in particular the improvements in quantum efficiency beyond that in our recent work [16][17][18] in Section 2 and describe additional work for towards increasing throughput via other optical surfaces in Section 3. Finally, we discuss the theoretical overall throughput of FIREBall-2 as compared to FIREBall-1 in Section 4.…”

Section: Changes From Fireball-1mentioning

confidence: 99%

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High efficiency CCD detectors at UV wavelengths

et al. 2014

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The Faint Intergalactic Redshifted Emission Balloon (FIREBall) is a NASA/CNES balloon-borne ultraviolet multi-object spectrograph designed to observe the diffuse gas around galaxies (the circumgalactic medium) via line emission redshifted to ∼205 nm. FIREBall uses a ultraviolet-optimized delta doped e2v CCD201 with a custom designed high efficiency five layer anti-reflection coating. This combination achieves very high quantum efficiency (QE) and photon-counting capability, a first for a CCD detector in this wavelength range. We also present new work on red blocking mirror coatings to reduce red leak.

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Section: Changes From Fireball-1mentioning

confidence: 99%

“…16,17 Silicon is highly reflective in the UV (>60%) so reducing reflection is a simple way to increase the QE without modifying the CCD itself. At visible wavelengths, anti-reflection coatings have been highly refined to produce near 100% transmission at a selected wavelength.…”

Section: Advanced Ultraviolet Anti-reflection Coatingsmentioning

confidence: 99%

High efficiency CCD detectors at UV wavelengths

et al. 2014

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“…Additional multi-layer coatings are required to block the rest of the silicon waveband to the required levels. Figure 4 State-of-the-art in single layer UV AR coatings for silicon 12 …”

Section: Silicon Surface Treatmentsmentioning

confidence: 99%

Candidate detector assessment for the CASTOR mission

et al. 2014

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The Cosmological Advanced Survey Telescope for Optical and UV Research (CASTOR) is a proposed Canadian Space Agency (CSA) mission that would provide panoramic, high-resolution imaging of 1/8th of the sky in the UV/optical (150-550 nm) spectral region. This small-satellite class mission would provide high angular resolution ultra-deep imaging in three broad filters to supplement data from planned international dark energy missions (Euclid, WFIRST) as well as from the Large Synoptic Survey Telescope (LSST). One of the leading technical risks on this mission is the UV sensitivity required to approach 26th magnitude in the near UV band. We are planning to characterize a selected candidate technology down to 150 nm. We will review the main scientific and technical drivers for the mission and show how they constrain the available detector options. We will compare the sensitivity and general applicability of CCD, EMCCD, hybridized and monolithic CMOS FPA options.

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“…A detailed account of these results have been submitted for publication [15]. Briefly, thinned and delta-doped standard and electron multiplying CCDs (EMCCDs) were both used in a variety of tests to measure absolute QE.…”

Section: Introductionmentioning

confidence: 99%

“…With functional devices, we are able to directly measure the effect the AR coating has on transmission into the Si. Papers are in preparation on the stability and testing of these devices, as well as on detailed functional results and future FUV detector technology [15,16].…”

Section: Introductionmentioning

confidence: 99%

Ultraviolet antireflection coatings for use in silicon detector design

et al. 2011

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We report on the development of coatings for a charged-coupled device (CCD) detector optimized for use in a fixed dispersion UV spectrograph. Because of the rapidly changing index of refraction of Si, single layer broadband antireflection (AR) coatings are not suitable to increase quantum efficiency at all wavelengths of interest. Instead, we describe a creative solution that provides excellent performance over UV wavelengths. We describe progress in the development of a coated CCD detector with theoretical quantum efficiencies (QEs) of greater than 60% at wavelengths from 120 to 300 nm. This high efficiency may be reached by coating a backside-illuminated, thinned, delta-doped CCD with a series of thin film AR coatings. The materials tested include MgF 2 (optimized for highest performance from 120-150 nm), SiO 2 (150-180 nm), Al 2 O 3 (180-240 nm), , and HfO 2 (240-300 nm). A variety of deposition techniques were tested and a selection of coatings that minimized reflectance on a Si test wafer were applied to functional devices. We also discuss future uses and improvements, including graded and multilayer coatings.

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Delta-doped electron-multiplied CCD with absolute quantum efficiency over 50% in the near to far ultraviolet range for single photon counting applications

Cited by 63 publications

References 24 publications

High efficiency CCD detectors at UV wavelengths

High efficiency CCD detectors at UV wavelengths

Candidate detector assessment for the CASTOR mission

Ultraviolet antireflection coatings for use in silicon detector design

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