Demonstration of microcantilever array with simultaneous readout using an in-plane photonic transduction method

Hu, Weisheng; Anderson, Ryan; Qian, Yusheng; Song, Jigou; Noh, Jihyun; Kim, Seung Hyun; Nordin, Gregory P.

doi:10.1063/1.3186735

Cited by 15 publications

(26 citation statements)

References 36 publications

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“…[1], [20]- [22], is based on a rib waveguide directly fabricated in the PMCL. Light exiting the waveguide at the free end of the PMCL is coupled into an asymmetric multimode waveguide and differential splitter which splits light into two outputs.…”

Section: Photonic Microcantilever and Microfluidicsmentioning

confidence: 99%

“…The silicon device is designed for simultaneous readout of tens to hundreds of PMCLs on a single SOI chip and can be arranged in multiple arrays for multiple sensing opportunities per chip [22], which we demonstrate in this paper. For example, Fig.…”

Section: Photonic Microcantilever and Microfluidicsmentioning

confidence: 99%

“…Once an SOI chip is processed and prior to functionalization and PDMS integration, operation of the PMCLs is inspected and calibrated by physically deflecting each PMCL up and down and measuring its differential signal response [22]. During this step, damaged and unresponsive PMCLs are identified.…”

Section: A Experimental Equipment and Set-upmentioning

confidence: 99%

“…To address these issues and exploit the MCL's unique advantages, we recently developed a scalable in-plane photonic technique to simultaneously read out an array of MCLs on a single chip [1], [20]- [22], which we refer to as a photonic microcantilever (PMCL). This technique is compatible with direct attachment of receptors to the native oxide on the PMCLs such that a gold adhesion layer is avoided.…”

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confidence: 99%

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Weak Adsorption-Induced Surface Stress for Streptavidin Binding to Biotin Tethered to Silicon Microcantilever Arrays

Ness

Anderson

et al. 2013

IEEE Sensors J.

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We investigate the performance and limitations of silicon microcantilever arrays as biosensors in which receptor molecules are directly tethered to the native oxide without an intermediate metal adhesion layer such as gold. We use our recently developed in-plane photonic microcantilever (PMCL) readout method to simultaneously measure deflection of individual microcantilevers in a 16-PMCL array integrated with polydimethylsiloxane microfluidics. We demonstrate label-free biosensing of streptavidin using biotin that has been immobilized to only the top side of a subset of PMCLs within the array. The maximum surface stress that we measure is rather small (6 mN/m) for relatively high streptavidin concentration (4.7 µM). We attribute this result to lack of a metal adhesion layer, which eliminates strong surface stress generation from change in metal electronic charge density upon uptake of streptavidin by surfacebound biotin.

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Section: Photonic Microcantilever and Microfluidicsmentioning

confidence: 99%

Section: Photonic Microcantilever and Microfluidicsmentioning

confidence: 99%

Section: A Experimental Equipment and Set-upmentioning

confidence: 99%

mentioning

confidence: 99%

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Weak Adsorption-Induced Surface Stress for Streptavidin Binding to Biotin Tethered to Silicon Microcantilever Arrays

Ness

Anderson

et al. 2013

IEEE Sensors J.

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“…We have recently developed a new inplane photonic technique to simultaneously read out an array of MCLs on a single chip [2][3][4][5]. In this paper we briefly review operation of our transduction method, followed by the status of array scale up and PDMS integration with MCL arrays.…”

Section: Imentioning

confidence: 99%

Microcantilever array sensors with integrated PDMS microfluidics

Nordin

Anderson

et al. 2011

2011 IEEE SENSORS Proceedings

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We recently developed a new in-plane photonic transduction method for simultaneous readout of microcantilevers in an array on a single chip. Here we describe scale-up of array size to 64 microcantilevers (MCLs) and integration of polydimethylsiloxane (PDMS) microfluidics with chips including multiple MCL arrays. We illustrate biosensing with biotin/streptavidin as a model system, and demonstrate an integrated on-chip pump with a MCL array. I.INTRODUCTION Microcantilevers (MCLs) have attracted significant interest as biosensors [1], in part because of their label-free approach to sensing. We have recently developed a new inplane photonic technique to simultaneously read out an array of MCLs on a single chip [2][3][4][5]. In this paper we briefly review operation of our transduction method, followed by the status of array scale up and PDMS integration with MCL arrays. We discuss PDMS-to-silicon bonding, a new transient deflection phenomena and how to avoid it, biotin/streptavidin as a simple model system, and integration of an on-chip PDMS pump.

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3D‐Printed Scanning‐Probe Microscopes with Integrated Optical Actuation and Read‐Out

Dietrich

Göring

Trappen

et al. 2019

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realized as a sharp tip with nanometersize apex attached to a micrometer-scale cantilever. In current SPM systems, tip and cantilever are usually structured in a dedicated microfabrication process before being manually mounted and aligned to a macroscopic optomechanical system for piezoelectric actuation and optical detection of sub-nanometer movements. This concept leads to rather bulky implementations and requires laborious operation, given that the tip is a wear part that has to be regularly exchanged and re-aligned to the read-out system. In addition, tip-cantilever geo metries are currently restricted by the underlying fabrication techniques, relying on 2D lithographic patterning and subsequent anisotropic etching. These techniques usually result in pyramidal tips with rather low aspect ratios, and the dimensions of the cantilever are often subject to fabrication tolerances that lead to variations of the resonance frequency of 30% or more. [10] Moreover, current SPM systems are often limited in scanning speed, which inhibits high-throughput characterization of large sample areas. This may be overcome by arrays of SPM cantilevers for parallel scanning, [11,12] but the scalability and integration density of current SPM schemes is limited by the fact that each cantilever must still be individually addressed by a dedicated actuator and sensor element of macroscopic dimension. Chiplevel integration of individually addressable cantilevers has been Scanning-probe microscopy (SPM) is the method of choice for high-resolution imaging of surfaces in science and industry. However, SPM systems are still considered as rather complex and costly scientific instruments, realized by delicate combinations of microscopic cantilevers, nanoscopic tips, and macroscopic read-out units that require high-precision alignment prior to use. This study introduces a concept of ultra-compact SPM engines that combine cantilevers, tips, and a wide variety of actuator and read-out elements into one single monolithic structure. The devices are fabricated by multiphoton laser lithography as it is a particularly flexible and accurate additive nanofabrication technique. The resulting SPM engines are operated by optical actuation and read-out without manual alignment of individual components. The viability of the concept is demonstrated in a series of experiments that range from atomic-force microscopy engines offering atomic step height resolution, their operation in fluids, and to 3D printed scanning near-field optical microscopy. The presented approach is amenable to wafer-scale mass fabrication of SPM arrays and capable to unlock a wide range of novel applications that are inaccessible by current approaches to build SPMs.The ORCID identification number(s) for the author(s) of this article can be found under https://doi.

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Demonstration of microcantilever array with simultaneous readout using an in-plane photonic transduction method

Cited by 15 publications

References 36 publications

Weak Adsorption-Induced Surface Stress for Streptavidin Binding to Biotin Tethered to Silicon Microcantilever Arrays

Weak Adsorption-Induced Surface Stress for Streptavidin Binding to Biotin Tethered to Silicon Microcantilever Arrays

Microcantilever array sensors with integrated PDMS microfluidics

3D‐Printed Scanning‐Probe Microscopes with Integrated Optical Actuation and Read‐Out

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