Digest of Papers. Microprocesses and Nanotechnology'98. 198 International Microprocesses and Nanotechnology Conference (Cat. No 1998
DOI: 10.1109/imnc.1998.730068
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Deposition And Patterning Technique For Realization Of PZT Thick Film Micro Actuator

Ryutaro Maeda
1
,
Jiaru Chu2,
Andreas Schroth3
et al.
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