Depth profiles and concentration percentages of SiO2 and SiO x induced by ion bombardment of a silicon (100) target

Lee, Chin Shuang; Chen, Chia Chan; Hsu, Chin Shun; Lee, Shyong; Hsu, Ron Kai

doi:10.1007/s10854-008-9658-5

J Mater Sci: Mater Electron

2008

DOI: 10.1007/s10854-008-9658-5

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Depth profiles and concentration percentages of SiO2 and SiO x induced by ion bombardment of a silicon (100) target

Chin Shuang Lee

Chia Chan Chen

Chin Shun Hsu

et al.

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Depth profiles and concentration percentages of SiO2 and SiO x induced by ion bombardment of a silicon (100) target

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References 12 publications

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