Design and fabrication of synthetic air-jet micropump

Abstract

NOMENCLATURE D = chamber diameter H = chamber height d 1 = diffuser inlet width d 2 = diffuser outlet width d 3 = air inlet channel width d 4 = air inlet gate length d 5 = air outlet channel width dh = diffuser lengthIn this paper, we propose a synthetic jet-type micropump for supplying air. Synthetic jet actuators usually include a small single pumping cavity, inlet/outlet channels, and a Lead zirconate titanate(PZT) membrane that exerts the pumping pressure. To determine the optimum design parameters of the air pump, a numerical analysis was carried out by varying its geometry. The optimized air pump was fabricated by replicating PDMS parts from silicon masters patterned by the deep RIE process. The size of the fabricated micropump was 16 × 13 × 3 mm 3 . In order to control the frequency of the PZT membrane and reduce the controller size and power consumption, an SP4423 microchip was used. At a pumping frequency of 80 Hz, a flow rate of 9.5 cc/min, pumping pressure of 438 Pa, and power consumption less than 0.15 mW were achieved.

Simulation Study of Screw Micro Pumps Design and Performance

“…Also performed clinical application to prove its feasibility usage. Jong Phil Choi, et al [11] proposed a synthetic jet-type micro-pump for supplying air. Synthetic jet actuators usually include a small single pumping cavity, inlet/outlet channels, and a Lead Zirconate Titanate membrane that exerts the pumping pressure.…”

Effects and New Applications of Pulsed Flow

“…In literature, such jets are named ªsynthetic jetsº according to [42]. Several applications are possible and under examination, as, e.g., the transport of fluids by entrainment as well as the application in pumps [43,44]. The picture was taken with a light sheet passing through the center plane of a 60 60 mm (cross section) acrylic channel filled with a glycerol-water mixture l = 10 mPa s and operated at an amplitude A = 8.7 mm at a 4-mm diameter spherical hole and a pulsation frequency f = 20 Hz.…”

“…For more information see also the video clip on our homepage. Several applications are possible and under examination, as, e.g., the transport of fluids by entrainment as well as the application in pumps [43,44]. Another advantage is the possibility to distribute a pulsating working fluid to several locations and execute multiple pumping effects there.…”

Fabrication of polytetrafluoroethylene–carbon nanotube composite coatings for friction and wear reduction

“…Among several polymers that are often utilized as mechanical components, polytetrafluoroethylene (PTFE) is an especially important industrial polymer as it is chemically stable and has relatively low friction coefficient [11,12]. PTFE is generally used as an anti-adhesion coating due to its low surface energy and good hydrophobicity [13][14][15]. However, PTFE also has disadvantages of having relatively low mechanical strength and poor wear resistance [16].…”