Design and performance analysis of a dual channel RF MEMS switch with separate bias voltage and signal paths for aerospace applications

Devakirubai, E. Esther; Kannan, S.; Manivannan, M. I.

doi:10.1007/s12008-023-01199-7

Cited by 4 publications

(2 citation statements)

References 21 publications

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“…The output of the research validates that the switch can offer a pull-in voltage as low as 4.4 V for a beam thickness of 1 µm. The researchers in [133] presented an MEMS capacitive switch with silicon nitride dielectric involving a varying section fixed-fixed beam as show in Figure 9. The varying section of the clamped-clamped beam reduces the spring constant of the beam and offers low pull-in voltage.…”

Section: High Actuation Voltagementioning

confidence: 99%

MEMS Switch Realities: Addressing Challenges and Pioneering Solutions

Kurmendra,

Agarwal

2024

Micromachines

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Micro-Electro-Mechanical System (MEMS) switches have emerged as pivotal components in the realm of miniature electronic devices, promising unprecedented advancements in size, power consumption, and versatility. This literature review paper meticulously examines the key issues and challenges encountered in the development and application of MEMS switches. The comprehensive survey encompasses critical aspects such as material selection, fabrication intricacies, performance metrics including switching time and reliability, and the impact of these switches on diverse technological domains. The review critically analyzes the influence of design parameters, actuation mechanisms, and material properties on the performance of MEMS switches. Additionally, it explores recent advancements, breakthroughs, and innovative solutions proposed by researchers to address these challenges. The synthesis of the existing literature not only elucidates the current state of MEMS switch technology but also paves the way for future research avenues. The findings presented herein serve as a valuable resource for researchers, engineers, and technologists engaged in advancing MEMS switch technology, offering insights into the current landscape and guiding future endeavors in this rapidly evolving field.

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Section: High Actuation Voltagementioning

confidence: 99%

MEMS Switch Realities: Addressing Challenges and Pioneering Solutions

Kurmendra,

Agarwal

2024

Micromachines

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“…For example, RF MEMS switches can achieve fast switching and modulation of RF signals. Devakirubai et al [148] proposed a MEMS switch made of a variable cross-section stationary beam using silicon nitride (Si 3 N 4 ) as an insulating material, which reduces the spring constant and the suction voltage. The structure of this RF switch has no dielectric charging, and the suction-close voltage is greatly reduced, which is effectively applied to intelligent communication in aerospace.…”

Section: Artificial Intelligencementioning

confidence: 99%

A review of research on RF MEMS for metaverse interactions

Nan,

Jia,

et al. 2024

J. Micromech. Microeng.

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Metaverse as a comprehensive integration of multiple digital technologies of the new generation, enables human beings to bring unprecedented immersive experiences with the support of virtual reality, augmented reality, blockchain, digital twin, Artificial Intelligence, haptic IoT, and human-computer interaction. In view of the urgent need for high-speed and high-capacity data transmission as well as high integration, RF MEMS devices have become the core components for metaverse system building due to their advantages of miniaturization, high integration, and low power consumption. Playing a pivotal role in real-time high-capacity data transmission and signal processing in metaverse interactive systems, the low cost and high performance of RF MEMS devices have once again become the focus of attention for people from all walks of life. Therefore, this paper focuses on the working principles and performance optimization of RF MEMS devices. Firstly, the classification and basic principles of RF MEMS devices are introduced, followed by the advanced fabrication technology and optimization scheme of MEMS devices, and then the advanced applications of RF MEMS devices in the field of metaverse are discussed in focus, including IoT mobile communication, Artificial Intelligence, and flexible wearables. Finally, the prospects and potential challenges for the development of RF MEMS devices interacting with the metaverse are summarized and discussed.

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Mathematical validation of spring constant of a varying section fixed-fixed beam RF MEMS switch and effects of spring constant on the switching parameters

Devakirubai

Manivannan

2023

Sādhanā

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Design and performance analysis of a dual channel RF MEMS switch with separate bias voltage and signal paths for aerospace applications

Cited by 4 publications

References 21 publications

MEMS Switch Realities: Addressing Challenges and Pioneering Solutions

MEMS Switch Realities: Addressing Challenges and Pioneering Solutions

A review of research on RF MEMS for metaverse interactions

Mathematical validation of spring constant of a varying section fixed-fixed beam RF MEMS switch and effects of spring constant on the switching parameters

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