Design Approach for Reducing Cross-Axis Sensitivity in a Single-Drive Multi-Axis MEMS Gyroscope

Abstract

In this paper, a new design technique is presented to estimate and reduce the cross-axis sensitivity (CAS) in a single-drive multi-axis microelectromechanical systems (MEMS) gyroscope. A simplified single-drive multi-axis MEMS gyroscope, based on a mode-split approach, was analyzed for cross-axis sensitivity using COMSOL Multiphysics. A design technique named the “ratio-matching method” of drive displacement amplitudes and sense frequency differences ratios was proposed to reduce the cross-axis sensitivity. Initially, the cross-axis sensitivities in the designed gyroscope for x and y-axis were calculated to be 0.482% and 0.120%, respectively, having an average CAS of 0.301%. Using the proposed ratio-matching method and design technique, the individual cross-axis sensitivities in the designed gyroscope for x and y-axis were reduced to 0.018% and 0.073%, respectively. While the average CAS was reduced to 0.045%, showing a reduction rate of 85.1%. Moreover, the proposed ratio-matching method for cross-axis sensitivity reduction was successfully validated through simulations by varying the coupling spring position and sense frequency difference variation analyses. Furthermore, the proposed methodology was verified experimentally using fabricated single-drive multi-axis gyroscope.

A novel framework of building operation algorithm for the block of technical diagnostics of aircraft’s automatic control system

“…On the other hand, when measurement tools are present (in this case, angular speed sensors and angle sensors), ( 13) is rewritten as (14). Based on the diagnostic analysis results obtained from the system ( 14), we can accurately identify the exact time of failure during parameter measurement or calculation.…”

“…Then it is necessary to determine the failure parameters and methods to fix the failure of the sensor system. The status of other components of the ACS is determined similarly [14].…”

Design and Analysis of Optomechanical Micro-Gyroscope for Angular-Vibration Detection

“…In this section, we compare the performance characteristics of previously reported high-precision micro-opto-electro-mechanical systems (MOEMS) gyroscopes to our novel dual-frame optomechanical gyroscope architecture incorporating an integrated photonic crystal cavity. As summarized in Table 3, three earlier frame-type MEMS gyroscope designs utilized an electrostatic comb drive actuator and displacement sensor [39,42,43]. However, these approaches exhibited limitations associated with electronic noise introduced by the driving and sensing methods employing different operating modes.…”

Bias-Repeatability Analysis of Vacuum-Packaged 3-Axis MEMS Gyroscope Using Oven-Controlled System

“…Temperature-induced errors occur due to changes in the material properties of the selected material and electronic parts. In MEMS sensors, temperature-induced errors result in several other errors, such as spring softening, resonant frequency error, cross-axis sensitivity, and bias instability [ 17 , 18 , 19 , 20 ]. Among all the high-performance MEMS gyroscope specifications, bias stability is the first thing system designers must ensure to deliver performance [ 21 ].…”