Design, Modeling and Analysis of Perforated RF MEMS Capacitive Shunt Switch

Rao, K. Srinivasa; Chand, Ch. Gopi; Sravani, K. Girija; Prathyusha, D.; Naveena, P.; Lakshmi, G. Sai; Kumar, Prem; Narayana, T. Lakshmi

doi:10.1109/access.2019.2914260

Cited by 26 publications

(4 citation statements)

References 29 publications

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“…MEMS are multiphysics devices and generally require the optimization of multiple output responses for a given set of design parameters and microfabrication process constraints. The optimization of MEMS is traditionally carried out by varying one factor at a time and analyzing its effect on an output response either by developing analytical models, FEM models, or topology optimization [14][15][16][17][18][19]. These methods are efficient for MEMS devices with simple geometric configuration but for MEMS with relatively complex geometry and with the requirement of multiphysics design space exploration and multiple output responses to be optimized simultaneously, these methods become inefficient due to high computational costs and modelling complexity.…”

Section: Introductionmentioning

confidence: 99%

A Systematic Design Optimization Approach for Multiphysics MEMS Devices Based on Combined Computer Experiments and Gaussian Process Modelling

Saghir

Saleem

Hamza

et al. 2021

Sensors

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This paper presents a systematic and efficient design approach for the two degree-of-freedom (2-DoF) capacitive microelectromechanical systems (MEMS) accelerometer by using combined design and analysis of computer experiments (DACE) and Gaussian process (GP) modelling. Multiple output responses of the MEMS accelerometer including natural frequency, proof mass displacement, pull-in voltage, capacitance change, and Brownian noise equivalent acceleration (BNEA) are optimized simultaneously with respect to the geometric design parameters, environmental conditions, and microfabrication process constraints. The sampling design space is created using DACE based Latin hypercube sampling (LHS) technique and corresponding output responses are obtained using multiphysics coupled field electro–thermal–structural interaction based finite element method (FEM) simulations. The metamodels for the individual output responses are obtained using statistical GP analysis. The developed metamodels not only allowed to analyze the effect of individual design parameters on an output response, but to also study the interaction of the design parameters. An objective function, considering the performance requirements of the MEMS accelerometer, is defined and simultaneous multi-objective optimization of the output responses, with respect to the design parameters, is carried out by using a combined gradient descent algorithm and desirability function approach. The accuracy of the optimization prediction is validated using FEM simulations. The behavioral model of the final optimized MEMS accelerometer design is integrated with the readout electronics in the simulation environment and voltage sensitivity is obtained. The results show that the combined DACE and GP based design methodology can be an efficient technique for the design space exploration and optimization of multiphysics MEMS devices at the design phase of their development cycle.

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Section: Introductionmentioning

confidence: 99%

A Systematic Design Optimization Approach for Multiphysics MEMS Devices Based on Combined Computer Experiments and Gaussian Process Modelling

Saghir

Saleem

Hamza

et al. 2021

Sensors

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“…The voltage is applied on the two metal plates it will slightly under the step-down voltage, so the movable beam having maximum deflection. [24].…”

Section: Stress Analysismentioning

confidence: 99%

Electromechanical modelling and stress analysis of RF MEMS capacitive shunt switch

et al. 2022

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This paper presents the simulation and theoretically calculation results of a shunt switch with Electro-mechanical modelling and stress gradient characteristics. The analysis is done with three membrane structures such as plane beam, incorporated with and without perforations, and non-uniform meander type beam, these are simulated in the COMSOL Multiphysics tool. The various Modal analyses are carried out for different values of residual stress gradients such as different structures, materials, and beam thickness. These analyzes are described by the fact that higher stress gradient values are undesirable for switching. By analysing all the results we have observed that the stress analysis for a shows that non-uniform meandered switch experiences maximum stress of 35.6 MPa, and center deflection of 0.06 MPa/μm, the deformations of the beam which is the least among the considered switches.

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“…By reducing the number of connectors or selecting low insertion loss devices we can achieve low insertion loss. As power is expensive at greater frequencies, electromechanical switches provide the lowest possible loss along the transmission line [18][19][20]. The S-parameters of return, insertion, and isolations are shown in Figs.…”

Section: Rf-performance Analysismentioning

confidence: 99%

Design, Analysis and Simulation of RF MEMS Capacitive Shunt Switch with Perforations for Ka-Band Applications

Rao

Sravani

Chowdary

et al. 2021

Trans. Electr. Electron. Mater.

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This paper presents the design and analysis of an RF MEMS Shunt switch with low pull-in voltage and good RF performance. The switch includes a vertically deforming beam which includes perforations and meanders. This switch is developed to run at a Radio Frequency (RF) of 35 GHz. The significant accomplishments in this work are the pull in voltage that is minimized to 3.72 V, and the return loss is listed below − 26.6 dB, the insertion loss is listed less than − 0.22 dB and isolation is − 36.4 dB. The up and down capacitance of the switch is 110 fF, 1.58 pF, and the obtained capacitance ratio is 113.5. The product utilized for the CPW line is Gold (Au). The dielectric product utilized in between the beam and the CPW transmission line is Silicon Nitride (Si 3 N 4 ). We achieved electromechanical analysis through COMSOL software and RF analysis is done using HFSS software.

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Design, Modeling and Analysis of Perforated RF MEMS Capacitive Shunt Switch

Cited by 26 publications

References 29 publications

A Systematic Design Optimization Approach for Multiphysics MEMS Devices Based on Combined Computer Experiments and Gaussian Process Modelling

A Systematic Design Optimization Approach for Multiphysics MEMS Devices Based on Combined Computer Experiments and Gaussian Process Modelling

Electromechanical modelling and stress analysis of RF MEMS capacitive shunt switch

Design, Analysis and Simulation of RF MEMS Capacitive Shunt Switch with Perforations for Ka-Band Applications

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