Design of a low-cost nano-manipulator which utilizes a monolithic, spatial compliant mechanism

Culpepper, Martin L.; Anderson, Gordon A.

doi:10.1016/j.precisioneng.2004.02.003

Cited by 177 publications

(87 citation statements)

References 11 publications

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“…This is also due to their planar structure. Remarkably, the ratio of the planar stage in Culpepper and Anderson (2004) is not as high as expected. Also in spatial structures there is no clear relation between working range and flexure type.…”

Section: Discussionmentioning

confidence: 56%

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Review Article: Inventory of platforms towards the design of a statically balanced six degrees of freedom compliant precision stage

2011

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Abstract. For many applications in precision engineering, a six degrees of freedom (DoF) compliant stage (CS) with zero stiffness is desirable, to deal with problems like backlash, friction, lubrication, and at the same time, reduce the actuation force. To this end, the compliant stage (also known as compliant mechanism) can be statically balanced with a stiffness compensation mechanism, to compensate the energy stored in the compliant parts, resulting in a statically balanced compliant stage (SBCS). Statically balanced compliant stages can be a breakthrough in precision engineering. This paper presents an inventory of platforms suitable for the design of a 6 DoF compliant stage for precision engineering. A literature review on 3-6 DoF compliant stages, static balancing strategies and statically balanced compliant mechanisms (SBCMs) has been performed. A classification from the inventory has been made and followed up by discussion. An obviously superior architecture for a 6 DoF compliant stage was not found. All the 6 DoF stages are either non-statically balanced compliant structures or statically balanced non-compliant structures. The statically balanced non-compliant structures can be transformed into compliant structures using lumped compliance, while all SBCMs had distributed compliance. A 6 DoF SBCS is a great scope for improvements in precision engineering stages.

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Section: Discussionmentioning

confidence: 56%

“…In , Culpepper and Anderson (2004), and Chen and Culpepper (2006) the ratios are high, due to the almost planar structure of the stages, which are able to perform 6 DoF motion. But the largest ratio is reached by a spatial structure (Yun and Li, 2010).…”

Section: Discussionmentioning

confidence: 99%

Review Article: Inventory of platforms towards the design of a statically balanced six degrees of freedom compliant precision stage

2011

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“…where, h is an estimated worst case value of radiation-convection heat transfer coefficient (Culpepper and Anderson 2004). L is length of the driving beam and k is the thermal conductivity coefficient.…”

Section: Thermal Analysismentioning

confidence: 99%

Precision positioning using a novel six axes compliant nano-manipulator

Akbari

Pirbodaghi

2016

Microsyst Technol

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and nano-imprint lithography (Dash et al. 2015;Hosseini et al. 2016;Sitti and Hashimoto 2000). For instance, in optoelectronic devices, a fiber-to-fiber coupling system is used to couple light from one fiber to another or a laser diode requires to be aligned precisely in at least 5 axes. The conventional passive systems currently used for this purpose are lacking the required precision to align fibers and optical modules (Rubio-Sierra et al. 2005). Traditional positioners containing spherical/revolute joints can only be applied for microscale positioning because of the reduced precision caused by friction or wear in the joints. Moreover, clearance in the traditional joints exceeds the workspace of a nano-positioner (Sutherland et al. 1995;Chen et al. 2003;Trease et al. 2005). Compliant mechanisms based on flexure hinges offer an alternative promising route to achieve nanoscale positioning. They rely on deflection of some or all of their parts to achieve motion and hence, offer many advantages, such as reduction in number of parts, diminished friction and wear, and the need for assembly. Furthermore, the monolithic structure of the flexurehinged mechanisms facilitates their miniaturization and fabrication in the micro scale by the standard microfabrication processes (Yao et al. 2007;Lai et al. 2005;Chen and Culpepper 2006). However, an elaborate design is required to tackle the complexity of motion of several flexible parts. In this paper, a novel 6 axes nano manipulator using a distinct design of flexure hinges to achieve both in-plane and out of plane positioning is designed. Thermo-electro-mechanical actuator capable of applying force in transverse and longitudinal directions is integrated to achieve six degree of freedom positioning. The performance of the compliant positioner is investigated using finite element method (FEM). AbstractIn this paper, a novel micro-scale nano-manipulator capable of positioning in six degrees of freedom (DOF) is introduced. Undesired deflections, while operating in a specific DOF, are restricted by the aid of distinctive design of flexure hinges and actuators' arrangements. The compliant mechanism is actuated by thermo-electromechanical actuators, as they could be integrated and exert large forces in a nanometer resolution. The actuators are bidirectional capable of applying force in both transverse and longitudinal directions. Performance of the two degrees of freedom actuator is thoroughly explored via numerical and analytical analyses, showing a good agreement. The workspace and performance of the precision positioner is studied using finite element methods. Finally, identification of forward and inverse kinematic of the nanomanipulator is performed utilizing neural network concept. A well-trained and appropriate neural network can efficiently replace the time-consuming and complex analytical and experimental methods.

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“…Recently, flexure based mechanism with ultrahigh precision plays an increasing important role in many kinds of fields where high resolution and high repeatability accuracy are demanded, such as optical fiber alignment (Culpepper and Anderson, 2004), bioengineering (Li and Xu, 2006), scanning tunnel microscopy (STM) (Schitter et al, 2008). In precision applications such as following issues have attracted much attention: (1) resolution; (2) number of degrees of freedom(DOF); (3) workspace.…”

Section: Introductionmentioning

confidence: 99%

Design and analysis of a 3-DOF planar micromanipulation stage with large rotational displacement for micromanipulation system

Ding

Xiao

et al. 2017

Mech. Sci.

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Abstract. Flexure-based mechanisms have been widely used for scanning tunneling microscopy, nanoimprint lithography, fast servo tool system and micro/nano manipulation. In this paper, a novel planar micromanipulation stage with large rotational displacement is proposed. The designed monolithic manipulator has three degrees of freedom (DOF), i.e. two translations along the X and Y axes and one rotation around Z axis. In order to get a large workspace, the lever mechanism is adopted to magnify the stroke of the piezoelectric actuators and also the leaf beam flexure is utilized due to its large rotational scope. Different from conventional pre-tightening mechanism, a modified pre-tightening mechanism, which is less harmful to the stacked actuators, is proposed in this paper. Taking the circular flexure hinges and leaf beam flexures hinges as revolute joints, the forward kinematics and inverse kinematics models of this stage are derived. The workspace of the micromanipulator is finally obtained, which is based on the derived kinematic models.

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Design of a low-cost nano-manipulator which utilizes a monolithic, spatial compliant mechanism

Cited by 177 publications

References 11 publications

Review Article: Inventory of platforms towards the design of a statically balanced six degrees of freedom compliant precision stage

Review Article: Inventory of platforms towards the design of a statically balanced six degrees of freedom compliant precision stage

Precision positioning using a novel six axes compliant nano-manipulator

Design and analysis of a 3-DOF planar micromanipulation stage with large rotational displacement for micromanipulation system

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