2008 IEEE Ultrasonics Symposium 2008
DOI: 10.1109/ultsym.2008.0541
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Design of Computer Experiments: A powerful tool for the numerical design of BAW filters

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Cited by 4 publications
(2 citation statements)
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“…De * E e * S  (18) With: T: mechanical stress (Pa), E: electric field (V/m), S: mechanical strain, D: electric displacement(C/m²), c: stiffness tensor (Pa), : permittivity tensor (F/m) and e: piezoelectric tensor (C/m²) Unfortunately, one-dimensional approximation becomes too restrictive when we need to predict spurious modes that may appear with lateral direction mode coupling or with resonators electrical or mechanical cross coupling. Thus a 3D simulation tool is needed to compute the resonator in three dimensions.…”
Section: Finite Element Modelmentioning
confidence: 99%
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“…De * E e * S  (18) With: T: mechanical stress (Pa), E: electric field (V/m), S: mechanical strain, D: electric displacement(C/m²), c: stiffness tensor (Pa), : permittivity tensor (F/m) and e: piezoelectric tensor (C/m²) Unfortunately, one-dimensional approximation becomes too restrictive when we need to predict spurious modes that may appear with lateral direction mode coupling or with resonators electrical or mechanical cross coupling. Thus a 3D simulation tool is needed to compute the resonator in three dimensions.…”
Section: Finite Element Modelmentioning
confidence: 99%
“…Measurements and simulations for each filter are presented respectively in Figures 22 and 23 [16,17] and to reach desired resonant frequency. Ir electrodes are utilized in order to enhance electromechanical coupling [18]. Iridium is a metal that presents a high-density [19] which leads to a high acoustic impedance, a low electric resistivity, and a specific crystal structure that promotes the growth of AlN films of excellent piezoelectric activity [20].…”
Section: -Pole and 3-pole Ladder Filtersmentioning
confidence: 99%