Design of Parallel Kinematic XY Flexure Mechanisms

Awtar, Shorya; Slocum, Alexander H.

doi:10.1115/detc2005-85413

Cited by 76 publications

(95 citation statements)

References 11 publications

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“…minimum incremental motion). These good characteristics [9][10] include: 1) large range of motion along the desired direction (also large-range motion along the intending degree of freedom), 2) inherently well-constrained parasitic error motion (also the minimal undesired motion along the degree of constraint), 3) minimal cross-axis coupling motion 1 (also kinematostatic decoupling/outputdecoupling that is the minimal undesired motion along nonintending degree of freedom), 4) maximal actuator isolation (also input-decoupling that is the minimal transverse motion of the actuator), 5) minimal lost motion (also the minimal displacement difference between the actuator and the motion stage), 6) maximal drive stiffness (also the maximal overall stiffness between the point of actuation and the motion stage), 7) low thermal and manufacturing sensitivities, 8) compactness of the configuration, 9) minimal number of geometrical parameters (for example using identical modules), 10) low cost, and 11) desired dynamic performance (including high natural frequency and no uncontrollable mass).…”

Section: Introductionmentioning

confidence: 99%

“…A partial SC based design was discussed in [9] for a 2-PP XY CPM, which can only minimise the parasitic rotational yaw well if only one actuation force is applied. The SC refers to a point through which an actuation force along the primary motion direction is applied on the motion stage of a planarmotion/spatial-motion compliant module to produce the primary translation with minimised parasitic rotation.…”

Section: Sc Overlapping Based Approachmentioning

confidence: 99%

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Design of 3-legged XYZ compliant parallel manipulators with minimised parasitic rotations

Hao

2014

Robotica

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Original citationGuangbo ABSTRACTThis article deals with the design of 3-legged distributedcompliance XYZ compliant parallel manipulators (CPMs) with minimised parasitic rotations, based on the kinematically decoupled 3-PPPRR (P: prismatic joint, and R: revolute joint) and 3-PPPR translational parallel mechanisms (TPMs). The designs are firstly proposed using the kinematics substitution approach, with the help of the stiffness center (SC) overlapping based approach. This is done by appropriate embedded arrangement so that all of the SCs associated with the passive compliant modules overlap at the point where all of the input forces applied at the input stages intersect. Kinematostatic modelling and characteristic analysis are then carried out for the proposed large-range 3-PPPRR XYZ CPM with overlapping SCs. The results from finite element analysis (FEA) are compared to the characteristics found for the developed analytical models, as are experimental testing results (primary motion) from the prototyped 3-PPPRR XYZ CPM with overlapping SCs. Finally, issues on large-range motion and dynamics of such designs are discussed, as are possible improvements of the actuated compliant P joint. It is shown that the potential merits of the designs presented here include a) minimised parasitic rotations by only using three identical compliant legs; b) compact configuration and small size due to the use of embedded design; c) approximately kinematostatically decoupled design capable of easy control; and d) monolithic fabrication for each leg using existing planar manufacturing technologies such as electric discharge machining (EDM).

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Section: Introductionmentioning

confidence: 99%

Section: Sc Overlapping Based Approachmentioning

confidence: 99%

Design of 3-legged XYZ compliant parallel manipulators with minimised parasitic rotations

Hao

2014

Robotica

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“…(iv) Once the building blocks are generated, a library of design topologies can be generated by using the building block as an implementation of the constraints (following a constraint-based synthesis approach [29]) for satisfying the necessary kinematics. In a nutshell, using the performance-tuned building block allows to meet a strength, or modal performance criterion, while the constraint-based arrangement allows for satisfying the required kinematics.…”

Section: Primitivesmentioning

confidence: 99%

Integrated Design and Control of Flexure-Based Nanopositioning Systems — Part I: Methodology

Shilpiekandula¹

2011

IFAC Proceedings Volumes

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Flexure-based mechanisms, also referred to as flexures, are widely being used as motion-guidance, or bearing, elements in applications requiring multi-degree-of-freedom positioning and alignment. Unlike friction-bearings (such as sliding or rolling contact bearings), flexures can be designed to offer, to a large extent, reliable linear elastic motion with a high resolution (on the order of nanometers) over small ranges of motion (on order of micrometers). Example applications include positioning a probe or sample in atomic force microscopy, alignment of tool and sample in stamping processes, and fine-positioning of wafer steppers in semiconductor manufacturing. These applications are often required satisfy critical functional requirements, such as load-capacity, bandwidth, resolution, and range. A systematic approach is needed to simultaneously address the design and control challenges involved, starting from the initial design concept generation stage to the final control implementation and testing. In this paper, we present an integrated design and control method for implementing flexurebased nanopositioning systems. We discuss the need for varying design topology and order of a controller in design and control optimization. An automation engine generates a set of flexurebased design topologies and also controllers of varying order in the optimization. A simple 1-DOF example is worked out to illustrate the steps involved in using this methodology. The outcome of the exercise is a novel design topology, with it shape and size optimized, and a controller synthesized such that a desired control bandwidth and design requirements of strength and modal separation are met. World Congress of the International Federation of Automatic ControlThis work may not be copied or reproduced in whole or in part for any commercial purpose. Permission to copy in whole or in part without payment of fee is granted for nonprofit educational and research purposes provided that all such whole or partial copies include the following: a notice that such copying is by permission of Mitsubishi Electric Research Laboratories, Inc.; an acknowledgment of the authors and individual contributions to the work; and all applicable portions of the copyright notice. Copying, reproduction, or republishing for any other purpose shall require a license with payment of fee to Mitsubishi Electric Research Laboratories, Inc. All rights reserved. Abstract: Flexure-based mechanisms, also referred to as flexures, are widely being used as motion-guidance, or bearing, elements in applications requiring multi-degree-of-freedom positioning and alignment. Unlike friction-bearings (such as sliding or rolling contact bearings), flexures can be designed to offer, to a large extent, reliable linear elastic motion with a high resolution (on the order of nanometers) over small ranges of motion (on order of micrometers). Example applications include positioning a probe or sample in atomic force microscopy, alignment of tool and sample in stamping processes, and ...

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“…It is challenging to design an XY stage with a large workspace and a compact physical dimension, simultaneously. Using the modified area ratio (Xu, 2012) whose denominators the actuators' dimensions should be added into, the area ratios of the stages proposed in Awtar (2004), Xu (2012) and Yu et al (2015) are only about 0.067, 0.069 and 0.026 % respectively; (b) the out-of-plane payload capacity is weak. When applied large out-of-plane payload, the load-stiffening phenomenon (Awtar et al, 2007) emerges in PPXYSs, which would induce nonlinearity and cause the loss of travel range.…”

Section: Introductionmentioning

confidence: 99%

“…A large number of millimeter-scale PPXYSs were proposed by researchers. Awtar (2004), Trease et al (2004), Tang et al (2006), Xu (2012) and Yu et al (2015) have designed and developed millimeter even centimeter scale PPXYSs. However, there are two main defects of these PPXYSs: (a) the structures of the stages are relatively loose.…”

Section: Introductionmentioning

confidence: 99%

Design and development of a novel monolithic compliant XY stage with centimeter travel range and high payload capacity

2018

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Abstract. This article proposes a novel monolithic compliant spatial parallel XY stage (SPXYS). An important feature of the SPXYS lies in that it can deliver centimeter travel range and sustain large out-of-plane payload while possessing a compact structure, which makes the SPXYS suitable for some special applications such as Ultra-Violet Nanoimprint Lithography and soft-contact lithography. Different from conventional compliant positioning stages, the proposed SPXYS consists of a monolithic spatial parallel linear compliant mechanism (SPLCM) driven by four matching designed voice coil motors (VCMs). The moving platform of the stage is connected to the base by four spatial prismatic-prismatic (PP) joints, which are enveloped from planar PP joint based on the position space reconfiguration (PSR) method to realize desired travel range, payload capacity and compact size. The mechatronic model of the SPXYS is established by integrated using matrix structural analysis (MSA) and the method of images. The design flow chart of the SPXYS is given based on the key parameter sensitivity analysis. Furthermore, a reified SPXYS is designed and manufactured. The analytical design of the stage is confirmed by experiments. The reified stage has a travel range of 20.4 × 20.6 mm 2 , a compact structure with area ratio 1.87 %, and the resonant frequencies of the two working modes at 22.98 and 21.31 Hz. It can track a circular trajectory with the radius of 4.5 mm. The root mean squares (RMS) tracking error is 2 µm. The positioning resolution is 100 nm. The payload capacity test shows that the reified stage can bear 20 kg out-ofplane payload.

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Design of Parallel Kinematic XY Flexure Mechanisms

Cited by 76 publications

References 11 publications

Design of 3-legged XYZ compliant parallel manipulators with minimised parasitic rotations

Design of 3-legged XYZ compliant parallel manipulators with minimised parasitic rotations

Integrated Design and Control of Flexure-Based Nanopositioning Systems — Part I: Methodology

Design and development of a novel monolithic compliant XY stage with centimeter travel range and high payload capacity

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