Design of subwavelength-engineered surface grating couplers on a hybrid α-Si/SiN photonic platform
William Fraser,
Daniel Benedikovic,
Radovan Korcek
et al.
Abstract:The design of a high-efficiency grating coupler for silicon nitride (SiN) photonic integrated circuits is presented. Our devices use a high-index amorphous silicon (α-Si) overlay and subwavelength metamaterial apodization to achieve superior coupling efficiency compared to SiN-only gratings. The high index contrast of the α-Si layer results in increased grating strength, making it possible to radiate more power off-chip within the mode field diameter (MFD) of a standard single mode optical fiber. Simultaneousl… Show more
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