2020
DOI: 10.3233/jae-190029
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Design process of square column-shaped voice coil motor for magnetic levitation stage

Abstract: Magnetic levitation is state-of-the-art technology to realize 6 degree of freedom motion stages. The major weakness of magnetic levitation technology is the small force of the actuators, since electromagnetic actuators usually have small force compared to other actuators. Moreover, they always have to be turned on in order to compensate for the weight of the stage. In this paper, voice coil motors, a kind of electromagnetic actuator, are designed for a magnetic levitation stage. Two different types of voice co… Show more

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Cited by 8 publications
(9 citation statements)
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“…However, a high current will cause serious heating, which usually requires additional cooling measures. For example, the Hitachi moving coil servo valve adopts a high current to ensure its dynamic characteristics, while compressed air is required to forcibly dissipate heat [12][13][14]. The proportional solenoid is widely used as an EMC for electro-hydraulic proportional valves.…”
Section: Introductionmentioning
confidence: 99%
“…However, a high current will cause serious heating, which usually requires additional cooling measures. For example, the Hitachi moving coil servo valve adopts a high current to ensure its dynamic characteristics, while compressed air is required to forcibly dissipate heat [12][13][14]. The proportional solenoid is widely used as an EMC for electro-hydraulic proportional valves.…”
Section: Introductionmentioning
confidence: 99%
“…The former mainly includes voice coil motor, and the latter mainly includes linear force motor (LFM) and proportional solenoid. The forcedisplacement characteristic of voice coil motor has excellent linearity, [18][19][20] but the moving coil component has large volume and fragile structure, 21 and it needs large excitation current to obtain better dynamic response, which results in severe heat dissipation and additional cooling measures are required.…”
Section: Introductionmentioning
confidence: 99%
“…Furthermore, there is no connection unit, such as a guide, between the moving components and the ground, making it suitable for achieving a high degree of precision. Thus, a maglev device is the latest system, and many studies have been conducted on it in the last 30 years [4][5][6][7][8][9][10][11][12][13][14].…”
Section: Introductionmentioning
confidence: 99%
“…In particular, a voice coil motor (VCM) is widely used as an actuator in a maglev device in order to implement nanometer-level precision in a short stroke [8][9][10][11][12][13][14]. Since the VCM has a very simple structure and there is no mechanical contact between the mover and the stator, it does not suffer from friction or backlash, resulting in high precision and a rapid response.…”
Section: Introductionmentioning
confidence: 99%
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