Determination of Trace Elements in Silicon Powders by Inductively Coupled Plasma Quadrupole Mass Spectrometry With a Membrane Desolvation Sample Introduction System

Abstract

An inductively coupled plasma quadrupole mass spectrometer, equipped with a desolvation sample introduction system, was successfully used for the accurate determination of B, Al, P, Ti, Fe, and Cu in silicon powder samples. The effects of the operating conditions of the pneumatic nebulization membrane desolvation sample introduction system were optimized to achieve the best signal-to-background ratio for the elements studied. To avoid the vaporization loss of boron during sample dissolution, mannitol was added to the sample. The method alleviated the effects of polyatomic interferences at m/z 27, 31, 47, 48, 56, and 57 caused by 28 Si + spread