Abstract:In wafer plants, product will be manufactured through same process with different setups and specifications. This special manufacturing process is described as re-entrant flows. In photo process of wafer manufacturing, products is also restricted to be processed through same machine in each reentrance to improve quality. This phenomenon will cause scheduling in photo process being complicated and is proved to be a NP-hard problem. This research develops a mathematical model for photo process to minimize the ma… Show more
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.