Optics for EUV, X-Ray, and Gamma-Ray Astronomy VIII 2017
DOI: 10.1117/12.2275210
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Deterministic figure correction of piezoelectrically adjustable slumped glass optics

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Cited by 4 publications
(15 citation statements)
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“…Samples were prepared with the same experimental parameters used to produce recent adjustable optic prototypes. 13,15,[18][19][20][21] All films were prepared on 0.4-mm-thick Corning Eagle-XG™ glass substrates. Flat and cylindrical substrates with an ROC of 220 mm were used.…”
Section: Experimental Methodsmentioning
confidence: 99%
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“…Samples were prepared with the same experimental parameters used to produce recent adjustable optic prototypes. 13,15,[18][19][20][21] All films were prepared on 0.4-mm-thick Corning Eagle-XG™ glass substrates. Flat and cylindrical substrates with an ROC of 220 mm were used.…”
Section: Experimental Methodsmentioning
confidence: 99%
“…PbðZr 0.52 Ti 0.48 Þ 0.99 Nb 0.01 O 3 targets with 5 mol% excess PbO were sputtered at a chamber pressure of 4 mTorr, and an RF power density of 2.0 W∕cm 2 , to achieve an approximate deposition rate of 0.4 Å/s. 13,19,20 Measured thicknesses ranged from 0.57 to 0.51 μm. The sputter chamber had a sputter up geometry and a throw distance (h) of 136 AE 5 mm.…”
Section: Experimental Methodsmentioning
confidence: 99%
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