2022 33rd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) 2022
DOI: 10.1109/asmc54647.2022.9792518
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Developing a digital twin of a polymerization reaction for process optimization

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Cited by 2 publications
(3 citation statements)
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“…In our preliminary report [9] on the same system, we observed a linear increase of U with respect to time. One possible explanation for this is that the mobility of the polymer chains in the solution changes with increasing viscosity.…”
Section: Data-based Kernel Model Trainingsupporting
confidence: 53%
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“…In our preliminary report [9] on the same system, we observed a linear increase of U with respect to time. One possible explanation for this is that the mobility of the polymer chains in the solution changes with increasing viscosity.…”
Section: Data-based Kernel Model Trainingsupporting
confidence: 53%
“…The estimation strategy follows the principles described in [9] with some modifications. It was previously observed that the kernel estimates resulting from the measurements of this process are not time-independent, therefore a separate estimation for each interval in the dataset is necessary.…”
Section: Estimation Of the Training Setmentioning
confidence: 99%
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