Development and Application of One-Sided Piezoelectric Actuating Micropump

Abstract

Three types of one-sided actuating piezoelectric micropumps are studied in this paper. In the first type, one-sided actuating micropump with two check valves can enhance the flow rate and prevent the back flow in suction mode to keep the flow in one direction. Furthermore, the frequency modulator is applied in the micropump to adjust and promote the maximum flow rate higher than 5.0 mL/s. In the second type, valveless micropump with secondary chamber shows that the secondary chamber plays a key role in the application of the valveless micropump. It not only keeps the flow in one direction but also makes the flow rate of the pump reach 0.989 mL/s. In addition, when a nozzle/diffuser element is used in valveless micropump, the flow rate can be further improved to 1.183 mL/s at a frequency of 150 Hz. In the third type, piezoelectric actuating pump is regarded as an air pump in the application of a microfuel cell system, which can increase more air inlet to improve the fuel/air reaction and further increase the performance of fuel cell.