Development of a commercially viable piezoelectric force sensor system for static force measurement

Liu, Jun; Luo, Xinwei; Liu, Jingcheng; Li, Min; Lan, Qing

doi:10.1088/1361-6501/aa7dc0

Cited by 12 publications

(15 citation statements)

References 12 publications

(18 reference statements)

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“…Hence, piezoelectric force sensors are the optimal solution to measure the micro-dynamic forces. However, such sensors are not suitable for the measurement of static force [77]. The charge developed decays with a time constant.…”

Section: Piezoelectric Force Sensorsmentioning

confidence: 99%

Micro-force sensing techniques and traceable reference forces: a review

Yang

Zhao²,

Huang³

et al. 2022

Meas. Sci. Technol.

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Micro-force measurement with high resolution, accuracy, and reliability is of interest to a broad range of applications including gravitational wave detection, intelligent healthcare, bionic robot, and micromanipulation. Herein, the research development in recent years of micro-force sensors based on various principles is reviewed thoroughly, presenting the characteristics and applications, as well as summarizing their advantages and limitations. The indispensable component of force sensors, elastic sensitive elements, is underlined. Next, four kinds of not widely used but promising sensors are also introduced briefly. Finally, the traceable reference forces are analyzed, concluding with a future perspective into the corresponding challenges and opportunities of micro-force sensors for future research. This review aims at providing references for developing micro-force sensors and improving their performance.

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Section: Piezoelectric Force Sensorsmentioning

confidence: 99%

Micro-force sensing techniques and traceable reference forces: a review

Yang

Zhao²,

Huang³

et al. 2022

Meas. Sci. Technol.

View full text Add to dashboard Cite

show abstract

“…The quasi-static force measurement, based on this piezoelectric effect, is known to be challenging due to free charge carriers drifting toward the dipoles under static stress in the piezoelectric crystal, leading to leakage of electric charge and current in the electronic circuit and causing significant drift of the measured force quantity [17,18]. Solutions proposed in the literature require detailed knowledge and precise manipulation of the system's electronic circuit, and/or of the environmental conditions (e.g., ambient temperature, humidity) to which the system is subjected during operation [18][19][20][21]. For offthe-shelf, commercially available piezoelectric actuators, this information is not readily available.…”

Section: Force Measurement Principlementioning

confidence: 99%

An In-Situ, Micro-Mechanical Setup with Accurate, Tri-Axial, Piezoelectric Force Sensing and Positioning

et al. 2020

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To enable accurate characterization of the mechanical behavior of materials at the micro-scale, e.g., in micro-systems, experiments are required that are representative of the actual (often multi-axial) loading conditions to which these materials are subjected during fabrication and operation. Equally important is the acquisition of mechanical data in the form of multi-axial force measurements, and the measurement of kinematics by in-situ microscopic techniques. To this end, a micro-mechanical testing rig is here realized using commercially available piezoelectric actuators. It is shown that the setup measures forces with a resolution of ∼ 0.3 [mN] in the xand y-directions, and ∼ 50 [mN] in the z-direction, over a range of 5 [N], yielding a high dynamic (force) range. Furthermore, displacements can be imposed with a resolution of ∼ 1 [nm] over a range of 200 [μm], in all three directions (x, y, z). The setup is compact, vacuum compatible, and specimens are loaded on top of the setup so that the field of view is unobstructed, allowing for in-situ testing with optical and scanning electron microscopy, and optical profilometry. A generic method is developed for extracting quasi-static forces from the piezoelectric actuators. Furthermore, challenges raised from the use of commercial actuators, for which the public technical specifications are generally incomplete, are overcome and the solution strategy is described. Proof-of-concept experiments on flexible, organic, light-emitting diodes demonstrate the potential of the setup to provide rich micro-mechanical data in the form of tri-axial force and displacement measurements. The commercial availability of the piezoelectric actuators, combined with the proposed engineering solutions lead to a generally accessible micro-mechanical test setup to investigate small-scale specimens under realistic, multi-axial loading conditions.

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“…The effective operating frequency band cannot cover the frequency spectrum range of the excitation signal, which leads to the introduction and amplification of the noise signal in the high-frequency band. The amplitude of the signal near the resonant frequency point increases greatly, and the response signal also appears violent vibration (Liu et al , 2017). Dynamic calibration and dynamic compensation are effective ways to solve this problem.…”

Section: Introductionmentioning

confidence: 99%

Research on dynamic calibration and compensation method of strain-gauge type force sensor

Gu,

Yuan,

et al. 2024

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Purpose This paper aims to propose an effective dynamic calibration and compensation method to solve the problem that the statically calibrated force sensor would produce large dynamic errors when measuring dynamic signals. Design/methodology/approach The dynamic characteristics of the force sensor are analyzed by modal analysis and negative step dynamic force calibration test, and the dynamic mathematical model of the force sensor is identified based on a generalized least squares method with a special whitening filter. Then, a compensation unit is constructed to compensate the dynamic characteristics of the force measurement system, and the compensation effect is verified based on the step and knock excitation signals. Findings The dynamic characteristics of the force sensor obtained by modal analysis and dynamic calibration test are consistent, and the time and frequency domain characteristics of the identified dynamic mathematical model agree well with the actual measurement results. After dynamic compensation, the dynamic characteristics of the force sensor in the frequency domain are obviously improved, and the effective operating frequency band is widened from 500 Hz to 1,560 Hz. In addition, in the time domain, the rise time of the step response signal is reduced from 0.29 ms to 0.17 ms, and the overshoot decreases from 26.6% to 9.8%. Originality/value An effective dynamic calibration and compensation method is proposed in this paper, which can be used to improve the dynamic performance of the strain-gauge-type force sensor and reduce the dynamic measurement error of the force measurement system.

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Development of a commercially viable piezoelectric force sensor system for static force measurement

Cited by 12 publications

References 12 publications

Micro-force sensing techniques and traceable reference forces: a review

Micro-force sensing techniques and traceable reference forces: a review

An In-Situ, Micro-Mechanical Setup with Accurate, Tri-Axial, Piezoelectric Force Sensing and Positioning

Research on dynamic calibration and compensation method of strain-gauge type force sensor

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