2021
DOI: 10.1021/acsphotonics.1c01750
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Development of a Compact and Robust Mid-Infrared Spectrometer by Using a Silicon/Air Hyperspectral Filter

Abstract: The molecular absorption spectrum in the midinfrared (mid-IR) region is typically measured by Fouriertransform infrared spectroscopy (FTIR). Such spectrometers require complex and delicately aligned interferometers, which increases their size and cost. Here, we present an alternative compact mid-IR spectrometer, which uses a variable mid-IR filter with a gradual change of cavity length between two silicon/air dielectric mirrors. When combined with a modern uncooled thermal imaging camera, hyperspectral filteri… Show more

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Cited by 13 publications
(3 citation statements)
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“…The mid‐infrared optical filter with gradual change of cavity thickness can be a good solution for the light dispersion elements of miniaturized mid‐IR spectrometers. [ 22 ] In our previous work, silicon/air mirrors, utilizing free‐standing silicon films, were used to create continuously variable optical filters in the mid‐IR range. However, this approach encountered a challenge: the bowing of the silicon film.…”
Section: Introductionmentioning
confidence: 99%
“…The mid‐infrared optical filter with gradual change of cavity thickness can be a good solution for the light dispersion elements of miniaturized mid‐IR spectrometers. [ 22 ] In our previous work, silicon/air mirrors, utilizing free‐standing silicon films, were used to create continuously variable optical filters in the mid‐IR range. However, this approach encountered a challenge: the bowing of the silicon film.…”
Section: Introductionmentioning
confidence: 99%
“…Even a small perturbation in initial conditions will induce a huge impact on the reconstructed results. Thus, much attention is focused on improving the signal-to-noise ratio, while the spectral resolution is always been ignored 31,35,36 . To improve the spectral resolution, many state-of-the-art techniques have employed tunable narrowband filters 37,38,39,40 .…”
Section: Introductionmentioning
confidence: 99%
“…In this mid-IR region, various optical devices such as Fourier transform infrared spectroscopy (FTIR) [ 2 ] and quantum cascade laser (QCL) [ 3 ] are used for molecular detection. In addition, there have been studies to miniaturize molecular sensors in the mid-infrared region using resonators such as the Fabry–Perot filter [ 4 ], frequency comb [ 5 , 6 ], and metasurface [ 7 , 8 ]. One of the major limitations in designing mid-IR optical systems is that there are few low-refractive-index materials with low absorption in the mid-IR region.…”
Section: Introductionmentioning
confidence: 99%