Development of a digital control system for high-performance pneumatic servo valve

Miyajima, Takashi; Fujita, Toshinori; Sakaki, Kazutoshi; Kawashima, Kenji; Kagawa, Toshiharu

doi:10.1016/j.precisioneng.2006.05.003

Cited by 41 publications

(18 citation statements)

References 4 publications

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“…The spool position accuracy is 0.1% to the full stroke. The maximum sonic conductance is 9.0×10 -9 m 4 s/kg [8]. The spool mass, spool diameter and effective area are 10.0g, 6.0mm and 5.0mm 2 , respectively.…”

Section: B the High-performance Pneumatic Servo Valvementioning

confidence: 97%

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Trajectory control of pneumatic servo table with air bearing

Kawashima

Kagawa

et al. 2011

Proceedings of 2011 International Conference on Fluid Power and Mechatronics

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In this paper, the trajectory control design of the pneumatic servo table considering the dynamics of pipelines and servo valve is proposed. The table is mainly composed by a pneumatic actuator, the high-performance pneumatic servo valve and pipelines. The pneumatic actuator utilizes a pneumatic cylinder with air bearings. This servo valve, with high dynamics up to 300Hz, is connected with the pneumatic actuator by pipelines. The whole system is pneumatically driven, it has advantages like low heat generation and non-magnetic, which are suitable for precise positioning. A linear model considering the dynamics of pipelines and the servo valve is designed to simulate the system. Compared with experimental results, it is found that with 7 th order linear control model, the discrepancy between experimental and simulation results became much smaller than the 3 rd order model was used. However, a low dimensional model is necessary for practical use. Since there are two poles which are much further from imaginary axis compared with other five poles in the pole loci of the 7 th order model, the model's order can be reduced into 5 th . By comparing simulation with experimental results, we found that the 5 th order model can also match with the real system well. Based on this result, a 5 th order feed forward has been designed. When a curve which can derivate by five times is inputted, the experimental results show that the maximum trajectory has been minimized by 20μm.

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Section: B the High-performance Pneumatic Servo Valvementioning

confidence: 97%

“…The full stroke of the spool is ±0.75mm and accuracy of the spool position is 0.1% to the full stroke. In order to detect the spool position, a position sensor with the resolution of 0.125μm is used [8]. …”

Section: B the High-performance Pneumatic Servo Valvementioning

confidence: 99%

Trajectory control of pneumatic servo table with air bearing

Kawashima

Kagawa

et al. 2011

Proceedings of 2011 International Conference on Fluid Power and Mechatronics

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“…This sensor outputs a 15-bit digital signal and measurements are fed to a PC via a digital input (DIO) module. In order to control the spool position, a digital controller including a calculation delay compensator and a disturbance observer is designed and applied to the servo valve [12].…”

Section: High-performance Pneumatic Servo Valve (Hppsv)mentioning

confidence: 99%

Development of coarse/fine dual stage using pneumatically driven bellows actuator and cylinder with air bearings

Kawashima

Arai

Tadano

et al. 2010

Precision Engineering

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“…dˆis created from the adaptive fuzzy estimator where Â is updated to compensate for SG, SG d and V t in Eq. (8). dˆ(x) is then added to the PID output and the added signal serve as the input to the real plant.…”

Section: System Configuration and Bulging Disturbancementioning

confidence: 99%