Development of a Laser Triangulation Displacement Probe with Laser Beam Pointing Control

Abstract

Directional dithering of a laser beam potentially limits the detection accuracy of a laser triangulation displacement probe. A theoretical analysis indicates that the measurement accuracy will linearly decrease as the laser dithering angle increases. To suppress laser dithering, a laser triangulation displacement probe with laser beam pointing control, which consists of a collimated red laser, a laser beam pointing control setup, a receiver lens, and a charge-coupled device, is proposed in this paper. The laser beam pointing control setup is inserted into the source laser beam and the measured object and can separate the source laser beam into two symmetrical laser beams. Hence, at the angle at which the source laser beam dithers, the positional averages of the two laser spots are equal and opposite. Moreover, a laser dithering compensation algorithm is used to maintain a stable average of the positions of the two spots on the imaging side. Experimental results indicate that with laser beam pointing control, the standard variance of the fitting error decreases from 0.3531 to 0.0100, the repeatability accuracy can be decreased from ±7 mm to ±5 µm, and the nonlinear error can be reduced from ±6 %FS to ±0.16 %FS.