Development of a resonant screw-driven piezoelectric motor operating in single-mode vibration

Abstract

A resonant screw-driven piezoelectric motor operating in single-mode vibrations is proposed, designed, manufactured, and studied. The motor is constructed with a stator and a threaded rotor. The stator consists of a hollow parallelogram metal elastomer and two piezoelectric ceramic plates. The motor is excited by a single-phase signal to produce two separate vibration modes: the first expansion mode (B1 mode) and the second expansion mode (B2 mode). Each mode drives the threaded rotor in one direction, and the bidirectional motion is achieved by switching the two modes. The construction is designed, and modal simulation is performed using finite element software to determine the structural parameters. A frequency-domain analysis is performed to obtain the frequency response characteristics, and the motion trajectories of the stator are obtained using transient analysis. Finally, a prototype is produced, and experiments are conducted. Experimental results indicate that the no-load speeds of the motor under the 200 Vp-p voltage excitation are 1.67 and 1.04 mm/s in the two modes, which correspond to maximum loads of 35 and 20 mN, respectively.