Development of a simple, low cost, indirect ion beam fluence measurement system for ion implanters, accelerators

Suresh, K.; Balaji, S.; Saravanan, K.; Navas, Javier; David, C.; Panigrahi, B. K.

doi:10.1088/1748-0221/13/02/p02033

Cited by 1 publication

(2 citation statements)

References 11 publications

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“…The RBS spectra were also simulated using SIMNRA software to estimate the presence of implanted ions in the sample. The entire procedure was followed as detailed elsewhere [20]. A close agreement of <3% between the fluence obtained from the standard RBS analysis and the fluence recorded by the automated system was observed.…”

Section: Applications Of the Systemmentioning

confidence: 87%

“…Based on our own experience on automation of ion beam channelling [19] and indirect ion fluence measurement [20], we have developed various virtual instruments for automation of the ion implantation, standard RBS and Hi-RBS experiments with the following goals of (a) obtaining the ion implantation, standard RBS and Hi-RBS energy spectra of the samples in the minimum possible time with the least requirement of human intervention (b) to get the energy spectra using as low a dose on the sample as possible to reduce the beam damage effects (c) to develop the software program which should be versatile, user-friendly, portable to different platforms, easy to meet changes in experimental demands or hardware, requiring short development time even for non-experts in conventional programming languages. With the virtual instrument automation, we are able to reduce the experimental duration and get the RBS spectra, resulting in an increased experimental throughput of the accelerator.…”

Section: Development Of Virtual Instruments For Automated Ion Implant...mentioning

confidence: 99%

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Development of PC based automation of ion beam analysis and ion implantation experiments

et al. 2020

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A: This paper presents the details of a personal computer (PC) based automation of ion beam analysis and ion implantation experimental setup that has been developed and implemented in a 1.7 MV Tandetron accelerator. Hardware and software of the PC automated system were designed to automate multiple sample ion implantation, standard Rutherford Backscattering spectrometry (RBS), and High resolution Rutherford Backscattering spectrometry (Hi-RBS) experiments. The system uses in-house developed signal conditioning circuitry, isolation amplifiers, and transistor drivers along with cost-effective and off-the-shelf commercial components like a general purpose, multifunction data acquisition card, etc. A five axis goniometer is used for handling multiple samples and their automatic positioning according to the commands from the PC over RS232 interface. Key tasks carried out in the automation of system include control and mesurement of ion beam fluence, selection of backscattered particles through screening of their energies by controlling a set of +/−25 kV and −3 kV high voltage power supplies, controlled collection of backscattered yield using single and multi channel analysers, controlling the region-of-interest windows in the energy spectra and the cumulative counts in them. Controlling the position of the samples and facilitating the experiments on multiple samples, online display of energy spectra and its auto storage, and vacuum interlocking are also automatically done. This PC based setup has been automated using a windows based LabVIEW software making it easy to port the set up between different computer operating systems apart from achieving many other advantages like quick and easy development of versatile, multi-purpose, and user friendly graphical interface. Extensive tests carried out on the hardware established correct functioning of various modules of the hardware. The 0-10 V control inputs applied to the +/−25 kV and −3 kV high voltage power supplies were tested and seen providing an <0.1% accuracy, <0.05% linearity, very low drift of 50 ppm, 0.01% precision, and <1mv rms output noise. The software modules have been tested to check independent control and monitoring the irradiated dose, energy to voltage conversion, the multi channel analyser 1Corresponding author.

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Section: Applications Of the Systemmentioning

confidence: 87%

Section: Development Of Virtual Instruments For Automated Ion Implant...mentioning

confidence: 99%

Development of PC based automation of ion beam analysis and ion implantation experiments

et al. 2020

Self Cite

View full text Add to dashboard Cite

show abstract

Development of a simple, low cost, indirect ion beam fluence measurement system for ion implanters, accelerators

Cited by 1 publication

References 11 publications

Development of PC based automation of ion beam analysis and ion implantation experiments

Development of PC based automation of ion beam analysis and ion implantation experiments

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