Development of an Advanced Sample‐Scanning Stage System Prototype for an MLL‐Based Hard X‐ray Nanoprobe

Shu, D.; Maser, J.; Chu, Y. S.; Yan, Hongyuan; Nazaretski, Evgeny; Ohara, Shingo; Kearney, Steven; Anton, Jayson; Quintana, Juan José; Shen, Qun

doi:10.1063/1.3625325

AIP Conference Proceedings

2011

DOI: 10.1063/1.3625325

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Development of an Advanced Sample‐Scanning Stage System Prototype for an MLL‐Based Hard X‐ray Nanoprobe

D. Shu¹,

J. Maser²,

Y. S. Chu³

et al.

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Cited by 4 publications

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Performance and characterization of the prototype nm-scale spatial resolution scanning multilayer Laue lenses microscope

Nazaretski

Kim

Yan

et al. 2013

Review of Scientific Instruments

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Synchrotron based x-ray microscopy established itself as a prominent tool for noninvasive investigations in many areas of science and technology. Many facilities around the world routinely achieve sub-micrometer resolution with a few instruments capable of imaging with the spatial resolution better than 100 nm. With an ongoing effort to push the 2D/3D resolution down to 10 nm in the hard x-ray regime both fabrication of the nano-focusing optics and stability of a microscope become extremely challenging. In this work we present our approach to overcome technical challenges on the path towards high spatial resolution hard x-ray microscopy and demonstrate the performance of a scanning fluorescence microscope equipped with the multilayer Laue lenses focusing optics.

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Performance and characterization of the prototype nm-scale spatial resolution scanning multilayer Laue lenses microscope

Nazaretski

Kim

Yan

et al. 2013

Review of Scientific Instruments

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A novel flexure-based vertical nanopositioning stage with large travel range

Zhu

Wen

et al. 2015

Review of Scientific Instruments

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This paper presents the design of a novel flexure-based vertical (or Z-axis) nanopositioning stage driven by a piezoelectric actuator (PZT), which is capable of executing large travel range. The proposed stage consists mainly of a hybrid displacement amplification mechanism (DAM), a motion guiding mechanism, and a decoupling mechanism. The hybrid DAM with amplification ratio of 12.1 is developed to transfer the transverse motion of the PZT actuator into the vertical motion. The motion guiding mechanism is introduced to avoid cross coupling at the output end. The decoupling mechanism can significantly reduce the cross coupling at the driving end to protect the PZT. The stiffness and dynamics of the proposed stage are improved by these mechanisms. Analytical modeling and finite element analysis (FEA) are then adopted to optimize dimensions of the stage. Finally, a prototype of the stage is fabricated and tested for verification. The results of static and dynamic tests show that the proposed stage is capable of vertical travel range of 214 μm with resolution of 8 nm, and the first two resonance frequencies are 205 Hz and 1206 Hz, respectively. Cross coupling tests under various lateral loads (0 g-1000 g) show that the maximum variances of the lateral and angular cross couplings are less than 0.78 μm and 95 μrad, respectively, indicating good decoupling capability. In addition, the low-profile structure of the stage is well suited to be used in limited vertical space.

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Progress of Mechanical Design of Nanopositioning Stages at the Advanced Photon Source

Kearney

Preissner

Shu

2018

Synchrotron Radiation News

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Development of an Advanced Sample‐Scanning Stage System Prototype for an MLL‐Based Hard X‐ray Nanoprobe

Cited by 4 publications

References 1 publication

Performance and characterization of the prototype nm-scale spatial resolution scanning multilayer Laue lenses microscope

Performance and characterization of the prototype nm-scale spatial resolution scanning multilayer Laue lenses microscope

A novel flexure-based vertical nanopositioning stage with large travel range

Progress of Mechanical Design of Nanopositioning Stages at the Advanced Photon Source

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