Abstract:By the method of nonreactive high-frequency magnetron sputtering on Upilex polyimide films, transparent and conductive layers of ITO were obtained. These layers, after high-temperature annealing, at temperatures typical for the solar cell formation, had a resistance of 11 ohm/□ and a transmittance of up to 72%. The use of such an ITO layer with the addition of a 100 nm thick layer of undoped zinc oxide, as the front contact, and Cu/ITO composition, as the back contact, made it possible to obtain a flexible sol… Show more
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