Development of capacitive MEMS microphone based on slit-edge for high signal-to-noise ratio

Yoo, Ilseon; Sim, Ji Hoon; Yang, Sang‐Hyeok; Kim, Hyunsoo

doi:10.1109/memsys.2018.8346745

Cited by 5 publications

(3 citation statements)

References 5 publications

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“…Extensive network modeling approaches have been discussed over the past years and have been published [10,11]. To improve the sensitivity, a diaphragm having slits at the edges was proposed by Yoo et al [12]. Circular diaphragms with and without slits at the edges of the diaphragm have been investigated, in which the diaphragm with slits shows a higher displacement.…”

Section: Introductionmentioning

confidence: 99%

A Novel MEMS Capacitive Microphone with Semiconstrained Diaphragm Supported with Center and Peripheral Backplate Protrusions

et al. 2021

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Audio applications such as mobile phones, hearing aids, true wireless stereo earphones, and Internet of Things devices demand small size, high performance, and reduced cost. Microelectromechanical system (MEMS) capacitive microphones fulfill these requirements with improved reliability and specifications related to sensitivity, signal-to-noise ratio (SNR), distortion, and dynamic range when compared to their electret condenser microphone counterparts. We present the design and modeling of a semiconstrained polysilicon diaphragm with flexible springs that are simply supported under bias voltage with a center and eight peripheral protrusions extending from the backplate. The flexible springs attached to the diaphragm reduce the residual film stress effect more effectively compared to constrained diaphragms. The center and peripheral protrusions from the backplate further increase the effective area, linearity, and sensitivity of the diaphragm when the diaphragm engages with these protrusions under an applied bias voltage. Finite element modeling approaches have been implemented to estimate deflection, compliance, and resonance. We report an 85% increase in the effective area of the diaphragm in this configuration with respect to a constrained diaphragm and a 48% increase with respect to a simply supported diaphragm without the center protrusion. Under the applied bias, the effective area further increases by an additional 15% as compared to the unbiased diaphragm effective area. A lumped element model has been also developed to predict the mechanical and electrical behavior of the microphone. With an applied bias, the microphone has a sensitivity of −38 dB (ref. 1 V/Pa at 1 kHz) and an SNR of 67 dBA measured in a 3.25 mm ´ 1.9 mm ´ 0.9 mm package including an analog ASIC.

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Section: Introductionmentioning

confidence: 99%

A Novel MEMS Capacitive Microphone with Semiconstrained Diaphragm Supported with Center and Peripheral Backplate Protrusions

et al. 2021

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“…To weaken the air resistance, Yoo et al [89] suggested a microphone with an increased number of ventilation holes in the back plate electrode. This microphone showed a flat frequency response between 2 and 20 kHz.…”

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confidence: 99%

“…They also showed that with the increase in membrane diameter, the effect of the center hole increases. To improve the sensitivity, a diaphragm having slits at the edges was proposed by Yoo et al [89]. The authors in this research study have investigated a circular diaphragm with and without slits at the edges, in which the diaphragm with slits shows a higher displacement.…”

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confidence: 99%

Design Approaches of MEMS Microphones for Enhanced Performance

Shah

Lee

et al. 2019

Journal of Sensors

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This paper reports a review about microelectromechanical system (MEMS) microphones. The focus of this review is to identify the issues in MEMS microphone designs and thoroughly discuss the state-of-the-art solutions that have been presented by the researchers to improve performance. Considerable research work has been carried out in capacitive MEMS microphones, and this field has attracted the research community because these designs have high sensitivity, flat frequency response, and low noise level. A detailed overview of the omnidirectional microphones used in the applications of an audio frequency range has been presented. Since the microphone membrane is made of a thin film, it has residual stress that degrades the microphone performance. An in-depth detailed review of research articles containing solutions to relieve these stresses has been presented. The comparative analysis of fabrication processes of single- and dual-chip omnidirectional microphones, in which the membranes are made up of single-crystal silicon, polysilicon, and silicon nitride, has been done, and articles containing the improved performance in these two fabrication processes have been explained. This review will serve as a starting guide for new researchers in the field of capacitive MEMS microphones.

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A review on the use of microslit for various applications and its fabrication

Majumder,

Patowari

2024

J Braz. Soc. Mech. Sci. Eng.

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Development of capacitive MEMS microphone based on slit-edge for high signal-to-noise ratio

Cited by 5 publications

References 5 publications

A Novel MEMS Capacitive Microphone with Semiconstrained Diaphragm Supported with Center and Peripheral Backplate Protrusions

A Novel MEMS Capacitive Microphone with Semiconstrained Diaphragm Supported with Center and Peripheral Backplate Protrusions

Design Approaches of MEMS Microphones for Enhanced Performance

A review on the use of microslit for various applications and its fabrication

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