“…According to DIN EN 60584, eight different thermocouple pairs are available, whereas Fe-CuNi [12], Cu-CuNi [13], NiCr-Ni [6][7][8][9] and Pt-10%Rh/Pt [14] are the most reported thin film thermocouples deposited by means of PVD. Apart from the standardized thermocouples, TiC-TaC [15], Al-Au [11], Ni-Cu [12,16], Ni-Fe [12], Cu-Fe [12], Chromel-Alumel [5,12], and Pt-Pd [4] thin film thermocouples are synthesized.…”