Development of high temperature resistant of 500 °C employing silicon carbide (3C-SiC) based MEMS pressure sensor

Production of nanograin microstructure in steel nanocomposite

“…In the present work σ ¼1189 MPa, f¼ 0.02, and σ r ¼3440 MPa [57,58]. Therefore, the yield strength of the IF steel matrix (σ m ) is calculated as 1143.1 MPa.…”

Pencirian Pertumbuhan Lapisan Nano Grafin di atas Elektrod antara Digit Superkapasitor MEMS

“…Superkapasitor MEMS khususnya dengan reka bentuk elektrod antara digit (IDE), telah menarik minat pada masa kini dalam bidang seperti bioMEMS, bioperubatan implan, peranti kuasa elektronik dan aplikasi berkuasa tinggi disebabkan kapasiti pengecasannya yang tinggi (Marsi et al 2015;Zainal Abidin et al 2013). MEMS berasaskan sensor, penggerak dan peranti elektronik mula bertapak dalam industri elektronik pada hari ini kerana kebolehpercayaan, keteguhan dan kemampuan untuk mencipta peranti dengan fungsi yang lebih luas (Hamzah et al 2004;Marsi et al 2012).…”

Laser-Welded Steel Foils with Sapphire Substrates

“…It is hence not surprising that it has also been considered for applications in the MEMS field. Some of the recent advances in the use of stainless steel in MEMS include: packaging [2], substrates for biocompatible devices, like pressure sensors [3], substrates in microfluidic devices [4] and substrates for electromechanical transducer materials for sensors and actuators as an alternative to the most common Si substrates, offering high fracture toughness even for a plates less than 50 lm thickness [5]. Even in the fields of organic light-emitting diodes (OLEDs) [6,7] and photovoltaics [8], stainless steel has been used as substrate.…”