Development of Hydraulic-Driven Devices Using Metal Bellows Structure

Sasaki, Tohru; Matsumoto, Naotoshi; Fujiwara, Yoshitaka; Hebisawa, Masao; Terabayashi, Kenji; Dohda, Kuniaki

doi:10.3850/978-981-11-2728-1_06

WCMNM 2018 World Congress on Micro and Nano Manufacturing 2018

DOI: 10.3850/978-981-11-2728-1_06

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Development of Hydraulic-Driven Devices Using Metal Bellows Structure

Tohru Sasaki¹,

Naotoshi Matsumoto²,

Yoshitaka Fujiwara³

et al.

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Development of Hydraulic-Driven Devices Using Metal Bellows Structure

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