Development of MEMS Angular Rate Sensor with Self-calibration Function

Abstract

Abstract-In the paper, new principles and methods for determining the transfer characteristic parameters for a micromechanical angular velocity sensor, as well as an assessment of the significance and efficiency of these parameters, have been described. The structure and algorithms for obtaining and processing calibration coefficients for implementing the MEMS self-calibration functions have been developed. The possibilities and degree of automation of processes for obtaining individual characteristics, testing and calibration have been determined.