“…Although hemispherical lens provides high NA, the image quality is relatively poor due to its high aberration that reduces the resolution of image. A micro lens array with high NA and low aberration is in particular needed as it features narrow focal spot, high lamination, and high resolution [1][2][3][4][5]. Many efforts have been employed, including non-spherical lens, Fresnel lens, and reflective-diffractive compound lens, to improve aberration.…”