Development of soft magnetic thin films for GHz applications

Vertically and horizontally aligned micro wire arrays with the magnetic hard axis perpendicular to the length of the wire are micro-fabricated from zero-magnetostrictive CoNbZr film. Annealing produced a 180-degree domain pattern, small coercive force and good permeability. Using the micro wire array with line/space = 9 m/2 m, an RF integrated inductor exhibited = 7 5 nH(+11% of air core's), = 7 6 and = 6 3 (almost same as the air core's).Index Terms-Bi-directional micro wire array, complex permeability, domain pattern, hysteresis curve, inductance, microfabrication, quality factor, RF integrated inductor.

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Equivalent circuit analysis of an RF integrated ferromagnetic inductor

Kuribara¹,

Yamaguchi²,

Arai³

2002

IEEE Trans. Magn.

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Development of soft magnetic thin films for GHz applications

Cited by 3 publications

References 3 publications

Improved RF integrated magnetic thin-film inductors by means of micro slits and surface planarization techniques

Improved RF integrated magnetic thin-film inductors by means of micro slits and surface planarization techniques

Application of bi-directional thin-film micro wire array to RF integrated spiral inductors

Equivalent circuit analysis of an RF integrated ferromagnetic inductor

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