Development of titanium oxide based 12µm pixel pitch uncooled infrared detector

Jeong, Yong Jin; Kang, Sang Gu; Kwon, Myung Ho; Jung, Han

doi:10.1117/12.2309764

Cited by 6 publications

(6 citation statements)

References 2 publications

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“…Based on material research, Kwon et al [29] reported the first TiO 2−x films based 50 μm pitch microbolometer with the NETD of 34 mK. Jeong et al [30] reported TiO 2−x based on the focal plane array with an array size of 640 × 480 pixels and 1024 × 768 pixels in 2018, the noise equivalent temperature difference (NETD) and time constant for the VGA detector were 40.5 mK and 8.5 msec, respectively. TiO 2−x has been widely studied in recent years because of its easy availability, environmental friendliness and good stability in harsh environment.…”

Section: Introductionmentioning

confidence: 99%

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TiO_2−x films for bolometer applications: recent progress and perspectives

Zhang

Yan

Peng

et al. 2022

Mater. Res. Express

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The bolometer is widely used in military and civilian infrared imaging due to its advantages of non-cooling, small size and portability. Thermosensitive materials seriously affect the performance of bolometers. As a kind of heat-sensitive material, the TiO2-x material has the advantages of good thermal stability, large-area preparation, and compatibility with the complementary metal-oxide semiconductor (CMOS) process. However, there is almost no review on the application of titanium oxide for bolometers. In this paper, we introduce the bolometer's main thermal and photoelectric performance parameters and the critical technologies to manufacture the bolometer. Finally, we will particularly emphasize the effects of preparation process parameters of TiO2 on the performance parameters temperature coefficient of resistance (TCR), 1/f noise, etc., were studied.

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Section: Introductionmentioning

confidence: 99%

“…Surface micromachining process of single-level structure bolometer. Reproduced with permission from[30].…”

mentioning

confidence: 99%

TiO_2−x films for bolometer applications: recent progress and perspectives

Zhang

Yan

Peng

et al. 2022

Mater. Res. Express

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“…Uncooled infrared focal plane array(IRFPA) was advantageous due to its small size, light weight, high yields and low cost 1 . The development trend of uncooled microbolometer is to provide smaller pixel size for high-resolution uncooled IRFPA 2 .…”

Section: Introductionmentioning

confidence: 99%

Low thermal mass long wave infrared metasurface absorber for small pixel microbolometer with fast response

Yang¹,

Lai²,

Gao³

2022

Infrared, Millimeter-Wave, and Terahertz Technologies IX

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We demonstrate a low thermal mass long wave infrared broadband metasurface absorber employed for a double-layer umbrella 8μm small pixel pitch microbolometer, which is achieved by depositing an array of metal patches on the thin dielectric slab and forming an optical resonator with a metal back-reflector. The absorber achieves near-unity optical absorptivity within the long wave infrared regime (8-14μm) due to its optical impedance exhbits a good matching characteristic with the free space impedance of 377Ω, while reducing significantly the thermal mass and obtaining the time constant of 10.96 ms. Consequently, the thermal response speed of the microbolometer is increased by nearly 50% compared with the multilayer absorbing film. Furthermore, maximum thermal mass reduction of the device is performed, finding the optimal perforated diameter 0.75μm with the thickness of SiNx film 65nm, which reduces the absorbing area by 28.8%, lower the time constant to 9.7ms and further improve the response speed of the detector, while maintaining the average LWIR absorption as high as 96%.

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“…The nature of the TIR modality makes them highly robust to both low-illumination conditions and in the presence of adverse obscurants [2]. Furthermore, due to the rapid growth in sensory technology [3], the quality of images and frame-rate generation of low SWaP, COTS, uncooled micro-bolometer arrays (µBA) based TIR cameras have increased to a level that is suitable for common computer vision tasks. As a result, there has been a…”

Section: Introductionmentioning

confidence: 99%

Online Photometric Calibration of Automatic Gain Thermal Infrared Cameras

Das,

Matthies,

Daftry

2020

Preprint

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Thermal infrared cameras are increasingly being used in various applications such as robot vision, industrial inspection and medical imaging, thanks to their improved resolution and portability. However, the performance of traditional computer vision techniques developed for electro-optical imagery does not directly translate to the thermal domain due to two major reasons: these algorithms require photometric assumptions to hold, and methods for photometric calibration of RGB cameras cannot be applied to thermal-infrared cameras due to difference in data acquisition and sensor phenomenology. In this paper, we take a step in this direction, and introduce a novel algorithm for online photometric calibration of thermalinfrared cameras. Our proposed method does not require any specific driver/hardware support and hence can be applied to any commercial off-the-shelf thermal IR camera. We present this in the context of visual odometry and SLAM algorithms, and demonstrate the efficacy of our proposed system through extensive experiments for both standard benchmark datasets, and real-world field tests with a thermal-infrared camera in natural outdoor environments.

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Development of titanium oxide based 12µm pixel pitch uncooled infrared detector

Cited by 6 publications

References 2 publications

TiO_2−x films for bolometer applications: recent progress and perspectives

TiO_2−x films for bolometer applications: recent progress and perspectives

Low thermal mass long wave infrared metasurface absorber for small pixel microbolometer with fast response

Online Photometric Calibration of Automatic Gain Thermal Infrared Cameras

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Development of titanium oxide based 12µm pixel pitch uncooled infrared detector

Cited by 6 publications

References 2 publications

TiO2−x films for bolometer applications: recent progress and perspectives

TiO2−x films for bolometer applications: recent progress and perspectives

Low thermal mass long wave infrared metasurface absorber for small pixel microbolometer with fast response

Online Photometric Calibration of Automatic Gain Thermal Infrared Cameras

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Product

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TiO_2−x films for bolometer applications: recent progress and perspectives

TiO_2−x films for bolometer applications: recent progress and perspectives