Diamond-based structures to collect and guide light

Castelletto, Stefania; Harrison, J. P.; Marseglia, Luca; Stanley-Clarke, A. C.; Gibson, Brant C.; Fairchild, Barbara A.; Hadden, J. P.; Ho, Y-L. D.; Hiscocks, Mark P.; Ganesan, Kumaravelu; Huntington, S.T.; Ladouceur, François; Greentree, Andrew D.; Prawer, S.; O’Brien, Jeremy L; Rarity, John

doi:10.1088/1367-2630/13/2/025020

Cited by 60 publications

(36 citation statements)

References 50 publications

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“…This image shows our ability to center the NV − on the SIL, it is also worth noting that the SIL imparts an effective magnification equivalent to the refractive index n = 2.4 of the diamond, thus making the apparent radial centering error of 500 nm translate to an actual positioning error of 210 nm. This is within the calculated error 12 for which the SIL operates at greater than 90% of the maximum efficiency. At the center of the trench a brightly fluorescent spot can be seen clearly.…”

Section: Applied Physics Letters 98 133107 ͑2011͒supporting

confidence: 80%

Nanofabricated solid immersion lenses registered to single emitters in diamond

Marseglia

Hadden

Stanley-Clarke

et al. 2011

Applied Physics Letters

116

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The mechanical properties of various chemical vapor deposition diamond structures compared to the ideal single crystal App. Phys. Rev. 2012, 3 (2012 The mechanical properties of various chemical vapor deposition diamond structures compared to the ideal single crystal J. Appl. Phys. 111, 051101 (2012) Bias-enhanced nucleation and growth processes for improving the electron field emission properties of diamond films J. Appl. Phys. 111, 053701 (2012) Direct visualization and characterization of chemical bonding and phase composition of grain boundaries in polycrystalline diamond films by transmission electron microscopy and high resolution electron energy loss spectroscopy Appl. Phys. Lett. 99, 201907 (2011) Impurity impact ionization avalanche in p-type diamond Appl. Phys. Lett. 99, 202105 (2011) Additional information on Appl. Phys. Lett. We describe a technique for fabricating micro-and nanostructures incorporating fluorescent defects in diamond with a positional accuracy better than hundreds of nanometers. Using confocal fluorescence microscopy and focused ion beam etching, we initially locate a suitable defect with respect to registration marks on the diamond surface then etch a structure using these coordinates. We demonstrate the technique by etching an 8 m diameter hemisphere positioned with single negatively charged nitrogen-vacancy defect lies at its origin. Direct comparison of the fluorescence photon count rate before and after fabrication shows an eightfold increase due to the presence of the hemisphere.

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Section: Applied Physics Letters 98 133107 ͑2011͒supporting

confidence: 80%

Nanofabricated solid immersion lenses registered to single emitters in diamond

Marseglia

Hadden

Stanley-Clarke

et al. 2011

Applied Physics Letters

116

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“…Recently diamond has emerged as a novel material for realizing optical components due to attractive material properties, such as high chemical and mechanical stability, high thermal conductivity and biocompatibility [10,11]. Because of an even larger bandgap compared to silicon nitride of 5.5 eV, diamond is transparent from ultra-violet wavelengths up into the infrared regime.…”

Section: Introductionmentioning

confidence: 99%

Waferscale nanophotonic circuits made from diamond-on-insulator substrates

Rath¹,

Gruhler²,

Khasminskaya³

et al. 2013

Opt. Express

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Wide bandgap dielectrics are attractive materials for the fabrication of photonic devices because they allow broadband optical operation and do not suffer from free-carrier absorption. Here we show that polycrystalline diamond thin films deposited by chemical vapor deposition provide a promising platform for the realization of large scale integrated photonic circuits. We present a full suite of photonic components required for the investigation of on-chip devices, including input grating couplers, millimeter long nanophotonic waveguides and microcavities. In microring resonators we measure loaded optical quality factors up to 11,000. Corresponding propagation loss of 5dB/mm is also confirmed by measuring transmission through long waveguides.

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“…The fabrication is scalable as nanowires can be fabricated in parallel on the same chip 77 . One of the limitations is due to the fabrication of nanopillars on a (100) facet single crystal diamond as ideally, an NV dipole should be perpendicular to the pillar's axis for maximum collection efficiencies 78 , while it forms an angle with the pillars, axis due to the NV-center orientation aligning along one of the four equivalent o 1114 crystal-directions. As high-quality, highpurity (111) …”

Section: Nanophotonics Componentsmentioning

confidence: 99%

Advances in diamond nanofabrication for ultrasensitive devices

Castelletto

Rosa

Blackledge³

et al. 2017

Microsyst Nanoeng

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This paper reviews some of the major recent advances in single-crystal diamond nanofabrication and its impact in nano-and micromechanical, nanophotonics and optomechanical components. These constituents of integrated devices incorporating specific dopants in the material provide the capacity to enhance the sensitivity in detecting mass and forces as well as magnetic field down to quantum mechanical limits and will lead pioneering innovations in ultrasensitive sensing and precision measurements in the realm of the medical sciences, quantum sciences and related technologies. INTRODUCTIONDiamond is an ideal platform for nano-and microfabrication leading to a range of robust sensors. This is due to the outstanding mechanical and wide spectral optical transparency of diamond, combined with biocompatibility and lack of toxicity in both bulk and nanostructures. Moreover, diamond can be fabricated with high purity and control using chemical vapor deposition. However, due to its hardness and cost, some of its applications in nanomechanics, optomechanics and nanophotonics reside mainly in its polycrystalline or nanocrystalline forms, which do not always retain the nuance of the outstanding properties of monocrystalline diamond.A recent review 1 describes diamond optical and mechanical properties compared to other materials currently used for optomechanical components (Si, Si 3 N 4 , SiC, and α-Al 2 O 3 ), showing that, in principle, there are more favorable properties of diamond for nanomechanical and optomechanical realizations. Therefore, a considerable effort has been taking place over the last five years to exploit these properties in a wide spectrum of diamond nanosystems. To date, single crystal diamond utilization for nanomechanical components 2 , (for example, nano electromechanical systems (NEMS) and micro electro-mechanical systems (MEMS)), as well for nanophotonics 3,4 compared to above mentioned materials, has been limited due to its growth requirements. In fact, a single crystal diamond cannot be grown on any other substrate than itself. This prevents wafer-scale processing and it represents a challenge in the application of conventional diamond nanofabrication methods. On the other hand, polycrystalline diamond films, which can be grown in high quality from 4 to 6 inches' wafers 5 , permit to fabricate optomechanical components with quality factors and oscillation frequencies rivaling single crystal diamond 6 .

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Diamond-based structures to collect and guide light

Cited by 60 publications

References 50 publications

Nanofabricated solid immersion lenses registered to single emitters in diamond

Nanofabricated solid immersion lenses registered to single emitters in diamond

Waferscale nanophotonic circuits made from diamond-on-insulator substrates

Advances in diamond nanofabrication for ultrasensitive devices

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