Diamond wafer technologies for semiconductor device applications

doi:10.1016/b978-0-08-102183-5.00001-7

Cited by 6 publications

(2 citation statements)

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“…Due to its high resistivity, diamond detectors operate similar to parallel plate capacitors which have diamond as the insulator. The chemical vapor deposition methods can routinely produce wafer-size polycrystalline diamond films [54,55]. However, with recent advancement in the deposition methods, even monocrystalline diamond films can be deposited over relatively large area (ranging from 1 inch to 3.6 inch in diameter) [56,57] as monocrystalline films are preferred for detector applications for obvious reasons.…”

Section: Diamondmentioning

confidence: 99%

Thin film charged particle detectors

et al. 2023

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Silicon tracking detectors have grown to cover larger surface areas up to hundreds of square meters, and are even taking over other sub-detectors, such as calorimeters. However, further improvements in tracking detector performance are more likely to arise from the ability to make a low mass detector comprised of a high ratio of active sensor to inactive materials, where dead materials include electrical services, cooling, mechanical supports, etc. In addition, the cost and time to build these detectors is currently large. Therefore, advancements in the fundamental technology of tracking detectors may need to look at a more transformative approach that enables extremely large area coverage with minimal dead material and is easier and faster to build. The advancement of thin film fabrication techniques has the potential to revolutionize the next-to-next generation of particle detector experiments. Some thin film deposition techniques have already been developed and widely used in the industry to make LED screens for TVs and monitors. If large area thin film detectors on the order of several square meters can be fabricated with similar performance as current silicon technologies, they could be used in future particle physics experiments. This paper aims to review the key fundamental performance criteria of existing silicon detectors and past research to use thin films and other semi-conductor materials as particle detectors in order to explore the important considerations and challenges to pursue thin film detectors.

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Section: Diamondmentioning

confidence: 99%

Thin film charged particle detectors

et al. 2023

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“…These detonation nanodiamonds (DND) [5] are now extensively used as nucleation seeds for the CVD growth of diamond. However, the detonation process (neither ultrasonic cavitation [6] nor microplasma processing [7]) can not make gemstone quality (Figure 3) larger diamond crystals, whereas, HPHT can make gemstones, but they are limited in size [8] and of inferior quality diamond with defects or foreign inclusion [9]. Beauty lies in the eyes of the beholder.…”

Section: Introductionmentioning

confidence: 99%