2020
DOI: 10.1002/ente.202000788
|View full text |Cite
|
Sign up to set email alerts
|

Dielectric Micro‐ and Sub‐Micrometric Spacers for High‐Temperature Energy Converters

Abstract: Dielectric microspacers (DMS) are important components in thermal energy converters. Engineered DMS are fabricated and characterized on different substrates by depositing patterned ceramic thin films of alumina (Al 2 O 3) and zirconia (ZrO 2) with a thickness ranging from 0.3 to 3 μm. Both Al 2 O 3 and ZrO 2 films are electrically and thermally optimized, finding zirconia more suitable as a thermal and electrical insulating material at high temperature, whereas the developed DMS are morphologically analyzed by… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1
1
1

Citation Types

0
13
0

Year Published

2021
2021
2025
2025

Publication Types

Select...
6

Relationship

0
6

Authors

Journals

citations
Cited by 20 publications
(13 citation statements)
references
References 37 publications
0
13
0
Order By: Relevance
“…[ 40 ] ), ii) columns (similar to Belbachir, An, and Ono [ 57 ] and Bellucci et al. [ 60 ] ), and iii) freestanding corrugated films (similar to Nicaise et al. [ 190 ] ).…”
Section: New Methods To Mitigate Space Chargementioning
confidence: 99%
See 3 more Smart Citations
“…[ 40 ] ), ii) columns (similar to Belbachir, An, and Ono [ 57 ] and Bellucci et al. [ 60 ] ), and iii) freestanding corrugated films (similar to Nicaise et al. [ 190 ] ).…”
Section: New Methods To Mitigate Space Chargementioning
confidence: 99%
“…[ 83 ] Perhaps the most elegant solution, however, is to use fixed‐form inserts within the gap to define the electrode spacing. This approach has been implemented in several forms, including commercially available micron‐scale grains such as polystyrene particles, [ 202 ] alumina beads, [ 40 ] and silica spheres [ 203 ] ; through lithographically defined insulators such as silicon dioxide or zirconia columns, [ 57,60,204,205 ] quartz standoffs, [ 206 ] and photoresist pillars [ 207,208 ] ; and through freestanding structures such as corrugated ceramic films. [ 48,190 ]…”
Section: Challenges and Recommendationsmentioning
confidence: 99%
See 2 more Smart Citations
“…Hafnia and alumina are high-κ dielectrics with remarkable properties, such as high abrasion resistance and high thermal and chemical stability, which make them useful in a wide area of applications: dielectric gate in various types of transistors [1,2], mirrors or antireflective coatings. They can be also used for the development of important components in novel high-temperature energy devices, such as hybrid thermionic converters, as a promising alternative to the presently used ceramics [3]. Besides the aforementioned applications, Al 2 O 3 has also been extensively investigated as a top layer for solar cells [4,5] because it passivates the silicon surface, and it also acts as an electron blocking layer, which increases the built-in potential and reduces recombination [6].…”
Section: Introductionmentioning
confidence: 99%