Dielectric modulated 4 H-SiC source triple metal gate-all-around silicon carbide FET (DM-TMGAA-SiCFET) biosensor for label-free biomolecule detection

Yadav, Shivani; Rewari, Sonam

doi:10.1007/s00542-024-05796-8

Microsyst Technol

2024

DOI: 10.1007/s00542-024-05796-8

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Dielectric modulated 4 H-SiC source triple metal gate-all-around silicon carbide FET (DM-TMGAA-SiCFET) biosensor for label-free biomolecule detection

Shivani Yadav,

Sonam Rewari

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Dielectric modulated 4 H-SiC source triple metal gate-all-around silicon carbide FET (DM-TMGAA-SiCFET) biosensor for label-free biomolecule detection

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References 63 publications

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