Diffractive Optics and Micro-Optics 1998
DOI: 10.1364/domo.1998.dthc.2
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Different concepts for the fabrication of hybrid (refractive/diffractive) elements

Abstract: Various fabrication methods have been investigated to manufacture refractive and diffractive micro-optical elements [1]. The structure of the elements is generated by holographic recording, optical lithography and direct writing (e-beam, laser beam). The pattern is then transferred into quartz by reactive ion etching (RIE), or replicated into plastic for low-cost mass production. Of special interest is the fabrication of hybrid elements, which combine the unique properties of diffractive optics (fan-out, high … Show more

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