2019
DOI: 10.1021/acsnano.9b05715
|View full text |Cite
|
Sign up to set email alerts
|

Direct Electrohydrodynamic Patterning of High-Performance All Metal Oxide Thin-Film Electronics

Abstract: In this paper, we propose a scalable approach toward all-printed high-performance metal oxide thin-film transistors (TFTs), using a high-resolution electrohydrodynamic (EHD) printing process. Direct EHD micropatterning of metal oxide TFTs is based on diverse precursor solutions to form semiconducting materials (In2O3, In-Ga-ZnO (IGZO)), conductive metal oxide (Sn-doped In2O3 (ITO)), as well as aluminum oxide (Al2O3) gate dielectric at low temperatures. The fully printed TFT devices exhibit excellent electron t… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1
1
1

Citation Types

2
31
0

Year Published

2020
2020
2022
2022

Publication Types

Select...
8

Relationship

1
7

Authors

Journals

citations
Cited by 36 publications
(33 citation statements)
references
References 37 publications
(53 reference statements)
2
31
0
Order By: Relevance
“…Accordingly, it would be better to use highly standardized, reproducible, and thermally stable oxide particles that can be dispersed and mixed in a uniform manner. Because the uniform mixing of two different dry oxide NPs is challenging, the intimate mixing of two different oxide NPs in a slurry state and subsequent deposition of slurry onto microelectrodes via microdispensing, ink-jet printing, [347][348][349][350][351] and direct electrohydrodynamic (EHD) patterning [352][353][354][355][356] can be considered for fabricating sensing film in a reproducible manner.…”
Section: Oxide-oxide Heterocompositesmentioning
confidence: 99%
“…Accordingly, it would be better to use highly standardized, reproducible, and thermally stable oxide particles that can be dispersed and mixed in a uniform manner. Because the uniform mixing of two different dry oxide NPs is challenging, the intimate mixing of two different oxide NPs in a slurry state and subsequent deposition of slurry onto microelectrodes via microdispensing, ink-jet printing, [347][348][349][350][351] and direct electrohydrodynamic (EHD) patterning [352][353][354][355][356] can be considered for fabricating sensing film in a reproducible manner.…”
Section: Oxide-oxide Heterocompositesmentioning
confidence: 99%
“…[ 71–73 ] Traditionally, various printing techniques have been developed and are widely used for solution‐based material distribution and patterning, such as inkjet printing, direct jetting, and lithography. [ 74,75 ] Recently, the rapid development of a high‐performance device has put forward higher demand for functional material patterning in pattern density, resolution, precision, as well as efficiency. Several challenges remain elusive for current material patterning methods, such as how to accurately dispense the materials into preset locations, how to maintain the uniformity between different fabrication cycles, how to achieve sharp pattern edges in microscale, and how to obtain high‐resolution patterns and/or keep a narrow gap between adjacent patterns.…”
Section: Applicationsmentioning
confidence: 99%
“…Numerous other EHD jet-printed electrode materials have been presented in the literature. 40,51,53,90,[94][95][96][97][98][99][100][101][102]…”
Section: Materials Advances Accepted Manuscriptmentioning
confidence: 99%
“…118 as the high-k gate dielectric. 40 The channel length of the metal oxide semiconductor layer was 7 μm. The all-printed TFTs had excellent electrical characteristics at a low operating voltage of 2 V, with an average electron μ FET = 117 cm 2 V -1 s -1 and an I on /I off = > 10 6 .…”
Section: Materials Advances Accepted Manuscriptmentioning
confidence: 99%